A novel wet-etching method using electric-field-assisted proton exchange in LiNbO3

Journal of Lightwave Technology

Volumn 22, Issue 7, 2004, Pages 1764-1771

  Wang, Tzyy Jiann ^a   Huang, Chih Feng ^a   Wang, Way Seen ^b   Wei, Pei Kuen ^c  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^c ACADEMIA SINICA   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFUSION; ELECTRIC FIELD EFFECTS; ELECTRODES; ETCHING; INTEGRATED CIRCUIT MANUFACTURE; ION EXCHANGE; LITHIUM NIOBATE; MIRRORS; MIXTURES; OPTICAL DESIGN; SCANNING ELECTRON MICROSCOPY;

ELECTRIC FIELD DISTRIBUTION; INTEGRATION DENSITY; PROTON DIFFUSION; PROTON EXCHANGE; WAVEGUIDE MIRROR; WET ETCHING METHOD;

INTEGRATED OPTICS;

EID: 4043121888     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2004.829229     Document Type: Article

References (28)

1. P. Buchmann and H. Kaufmann, "GaAs single-mode rib waveguide with reactive ion-etched totally reflecting corner mirrors," J. Lightwave Technol, vol. 3, pp. 785-788, Apr. 1985.
2. J. E. Johnson and C. L. Tang, "Precise determination of turning mirror loss using GaAs/AlGaAs lasers with up to ten 90° intracavity turning mirrors," IEEE Photon. Technol. Lett., vol. 4, pp. 24-26, Jan. 1992.
3. L. H. Spiekman, Y. S. Oei, E. G. Metaal, F. H. Groen, P. Demeester, and M. K. Smit, "Ultrasmall waveguide bends: The corner mirrors of the future," Proc. Inst. Elect. Eng. - Optoelectron., vol. 142, no. 1, pp. 61-65, Feb. 1995.
4. Y. Chung and N. Dagli, "Experimental and theoretical study of turning mirrors and beam splitters with optimized waveguide structures," Opt. Quantum Electron., vol. 27, pp. 395-403, 1995.
5. H. Han, D. V. Forbes, and J. J. Coleman, "Self-aligned high-quality total internal reflection mirrors," IEEE Photon. Technol. Lett., vol. 7, pp. 899-901, Aug. 1995.
6. L. Faustini, C. Coriasso, A. Stano, C. Cacciatore, and D. Campi, "Loss analysis and interference effect in semiconductor integrated waveguide turning mirrors," IEEE Photon. Technol. Lett., vol. 8, pp. 1355-1357, Oct. 1996.
7. S. T. Lau and J. M. Ballantyne, "Two-dimensional analysis of a dielectric waveguide mirror," J. Lightwave Technol., vol. 15, pp. 551-558, Mar. 1997.
8. R. Orobtchouk, S. Laval, D. Pascal, and A. Koster, "Analysis of integrated optical waveguide mirrors," J. Lightwave Technol., vol. 15, pp. 815-820, May 1997.
9. R. L. Espinola, R. U. Ahmad, F. Pizzuto, M. J. Steel, and R. M. Osgood Jr., "A study of high-index-contrast 90 degree waveguide bend structures," Optics Express, vol. 8, no. 9, pp. 517-528, 2001.
10. Y. Z. Tang, W. H. Wang, T. Li, and Y. L. Wang, "Integrated waveguide turning mirror in silicon-on-insulator," IEEE Photon. Technol. Lett., vol. 14, pp. 68-70, Jan. 2002.
11. C. Manolatou, S. G. Johnson, S. Fan, P. R. Villeneuve, H. A. Haus, and J. D. Joannopoulos, "High-density integrated optics," J. Lightwave Technol., vol. 17, pp. 1682-1692, Sept. 1999.
12. R. U. Ahmad, F. Pizzuto, G. S. Camarda, R. L. Espinola, H. Rao, and R. M. Osgood Jr., "Ultracompact corner-mirrors and T-branches in silicon-on-insulator," IEEE Photon. Technol. Lett., vol. 14, pp. 65-67, Jan. 2002.
13. Y. Chung, R. Spickermann, D. B. Young, and N. Dagli, "A low-loss beam splitter with an optimized waveguide structure," IEEE Photon. Technol. Lett., vol. 4, pp. 1009-1011, Sept. 1992.
14. A. Mekis, J. C. Chen, I. Kurland, S. Fan, P. R. Villeneuve, and J. D. Joannopoulos, "High transmission through sharp bends in photonic crystal waveguides," Phys. Rev. Lett., vol. 77, no. 18, pp. 3787-3790, 1996.
15. 3," Appl. Phys. Lett., vol. 35, pp. 756-758, 1979.
16. Y. Ohmachi and J. Noda, "Electro-optic light modulator with branched ridge waveguide," Appl. Phys. Lett., vol. 27, pp. 544-546, 1975.
17. 3," Appl. Phys. Lett., vol. 38, pp. 907-909, 1981.
18. F. Laurell, J. Webjörn, G. Arvidsson, and J. Holmberg, "Wet etching of proton-exchanged lithium niobate - A novel processing technique," J. Lightwave Technol., vol. 10, pp. 1606-1609, Nov. 1992.
19. H. J. Lee and S. Y. Shin, "Lithium niobate ridge waveguides fabricated by wet etching," Electron. Lett., vol. 31, no. 4, pp. 268-269, Feb. 1995.
20. R. S. Cheng, T. J. Wang, and W. S. Wang, "Wet-etched ridge waveguides in Y-cut lithium niobate," J. Lightwave Technol., vol. 15, pp. 1880-1887, Oct. 1997.
21. 3," J. Light-wave Technol., vol. 17, pp. 843-847, May 1999.
22. A. Himeno, H. Terui, and M. Kobayashi, "Loss measurement and analysis high-silica reflection bending optical waveguides," J. Lightwave Technol., vol. 6, pp. 41-46, Jan. 1988.
23. S. M. Lee, W. C. Chew, M. Moghaddam, M. A. Nasir, S. L. Chuang, R. W. Herrick, and C. L. Balestra, "Modeling of rough-surface effects in an optical turning mirror using the finite-difference time-domain method," J. Lightwave Technol., vol. 9, pp. 1471-1479, Nov. 1991.
24. S. T. Lau and J. M. Ballantyne, "Two-dimensional analysis of a dielectric waveguide mirror," J. Lightwave Technol., vol. 15, pp. 551-558, Mar. 1997.
25. R. Orobtchouk, S. Laval, D. Pascal, and A. Koster, "Analysis of integrated optical waveguide mirrors," J. Lightwave Technol., vol. 15, pp. 815-820, May 1997.
26. S. Wiechmann, H. J. Heider, and J. Müller, "Analysis and design of integrated optical mirrors in planar waveguide technology," J. Lightwave Technol., vol. 21, pp. 1584-1590, June 2003.
27. J. W. Park, Y. Beak, J. H. Song, E. D. Sim, S. B. Kim, and K. H. Park, "Attenuation characteristics of InP/InGaAsP deep-ridge waveguide turning mirror," Microwave and Optical Technol. Lett., vol. 37, no. 6, pp. 428-431, June 2003.
28. 3 optical modulator," IEEE Photon. Technol. Lett., vol. 3, pp.