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Volumn 19, Issue 5-6, 2010, Pages 418-422
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Diamond synthesis by plasma chemical vapor deposition in liquid and gas
a
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Author keywords
Diamond; Growth rate; High pressure; In liquid plasma; Microwave; Plasma CVD
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Indexed keywords
CVD METHOD;
DIAMOND GROWTH;
DIAMOND SYNTHESIS;
GASPHASE;
HIGH PRESSURE;
HIGH-SPEED;
LIQUID PLASMAS;
MICROWAVE ENERGIES;
MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITIONS;
MICROWAVE PLASMA CVD;
PER UNIT VOLUME;
PLASMA CHEMICAL VAPOR DEPOSITION;
SI SUBSTRATES;
SYSTEM PRESSURE;
ATMOSPHERIC PRESSURE;
BODY FLUIDS;
DIAMONDS;
GROWTH RATE;
LIQUIDS;
MICROWAVES;
PLASMA DEPOSITION;
PLASMAS;
RAMAN SPECTROSCOPY;
SCANNING ELECTRON MICROSCOPY;
SYNTHESIS (CHEMICAL);
CHEMICAL VAPOR DEPOSITION;
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EID: 77950370162
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2009.12.018 Document Type: Article |
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Times cited : (13)
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References (12)
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