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Volumn 312, Issue 9, 2010, Pages 1610-1616

Effect of conductive oxide buffering on structural and nanoscale electrical properties of ultrathin SrTiO3 films on Pt electrodes

(1) Liang, Yuan Chang a

a NATIONAL TAIWAN OCEAN UNIVERSITY (Taiwan)

Author keywords

A1. Characterization; A3. Physical vapor deposition processes; A3. Polycrystalline deposition; B1. Oxides

Indexed keywords

A3. POLYCRYSTALLINE DEPOSITION; B1. OXIDES; CHEMICAL HOMOGENEITY; COMPOSITION RATIO; CONDUCTIVE OXIDES; CRYSTALLINE STRUCTURE; DEPOSITION TEMPERATURES; DIELECTRIC CONSTANTS; DIELECTRIC THIN FILMS; ELECTRICAL PROPERTY; HIGH GROWTH TEMPERATURES; HIGH TEMPERATURE; NANO SCALE; NANOSTRUCTURAL; OUT-DIFFUSION; PHYSICAL VAPOR DEPOSITION PROCESS; POLY CRYSTALLINE DEPOSITION; PT ELECTRODE; SI SUBSTRATES; SRTIO; STO FILMS; STO THIN FILMS; ULTRA-THIN;

ELECTRIC PROPERTIES; FILM GROWTH; GROWTH TEMPERATURE; LEAKAGE CURRENTS; PHYSICAL VAPOR DEPOSITION; PLATINUM; RUTHENIUM ALLOYS; RUTHENIUM COMPOUNDS; STRONTIUM ALLOYS; SURFACE ROUGHNESS; TITANIUM;

ULTRATHIN FILMS;

EID: 77949917439 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/j.jcrysgro.2010.01.021 Document Type: Article

Times cited : (3)

References (20)

1
- 36448998565
- Joshi P.C., and Krupanidhi S.B. J. Appl. Phys. 73 (1993) 7627
- (1993) J. Appl. Phys. , vol.73 , pp. 7627
- Joshi, P.C.¹ Krupanidhi, S.B.²

2
- 14544305116
- He S., Li Y., Liu X., Tao B., Li D., and Lu Q. Thin Solid Films 478 (2005) 261
- (2005) Thin Solid Films , vol.478 , pp. 261
- He, S.¹ Li, Y.² Liu, X.³ Tao, B.⁴ Li, D.⁵ Lu, Q.⁶

3
- 0001331485
- Beck A., Bednorz J.G., Gerber C., Rossel C., and Widmer D. Appl. Phys. Lett. 77 (2000) 139
- (2000) Appl. Phys. Lett. , vol.77 , pp. 139
- Beck, A.¹ Bednorz, J.G.² Gerber, C.³ Rossel, C.⁴ Widmer, D.⁵

4
- 45249084754
- Liang Y.C., Liang Y.C., and Chu J.P. Electrochem. Solid State Lett. 11 (2008) G41
- (2008) Electrochem. Solid State Lett. , vol.11
- Liang, Y.C.¹ Liang, Y.C.² Chu, J.P.³

5
- 34547541825
- Liang Y.C., and Liang Y.C. J. Electrochem. Soc. 154 (2007) G193
- (2007) J. Electrochem. Soc. , vol.154
- Liang, Y.C.¹ Liang, Y.C.²

6
- 0032677656
- Maeder T., Muralt P., and Sagalowicz L. Thin Solid Films 345 (1999) 300
- (1999) Thin Solid Films , vol.345 , pp. 300
- Maeder, T.¹ Muralt, P.² Sagalowicz, L.³

7
- 27644488090
- Liang Y.C., and Liang Y.C. J. Cryst. Growth 285 (2005) 345
- (2005) J. Cryst. Growth , vol.285 , pp. 345
- Liang, Y.C.¹ Liang, Y.C.²

8
- 25644448001
- Liang Y.C., Lee H.Y., Liu H.J., Wu K.F., Wu T.B., and Lee C.H. J. Electrochem. Soc. 152 (2005) F129
- (2005) J. Electrochem. Soc. , vol.152
- Liang, Y.C.¹ Lee, H.Y.² Liu, H.J.³ Wu, K.F.⁴ Wu, T.B.⁵ Lee, C.H.⁶

9
- 65949117613
- Liang Y.C., and Liang Y.C. J. Electrochem. Soc. 156 (2009) G84
- (2009) J. Electrochem. Soc. , vol.156
- Liang, Y.C.¹ Liang, Y.C.²

10
- 20944439624
- Kurasawa M., and Mclntyre P.C. J. Appl. Phys. 97 (2005) 104110
- (2005) J. Appl. Phys. , vol.97 , pp. 104110
- Kurasawa, M.¹ Mclntyre, P.C.²

11
- 0003459529
- Perkin-Elmer, Minneapolis
- Wagner C.D., Riggs W.M., Davis L.E., Moulder J.F., and Muilenberg G.E. Handbook of X-ray Photoelectron Spectroscopy (1979), Perkin-Elmer, Minneapolis
- (1979) Handbook of X-ray Photoelectron Spectroscopy
- Wagner, C.D.¹ Riggs, W.M.² Davis, L.E.³ Moulder, J.F.⁴ Muilenberg, G.E.⁵

12
- 33747100962
- Atuchin V.V., Kesler V.G., Pervukhina N.V., and Zhang Z. J. Electron. Spectrosc. Relat. Phenom. 152 (2006) 18
- (2006) J. Electron. Spectrosc. Relat. Phenom. , vol.152 , pp. 18
- Atuchin, V.V.¹ Kesler, V.G.² Pervukhina, N.V.³ Zhang, Z.⁴

13
- 0000107525
- Sayers C.N., and Armstrong N.R. Surf. Sci. 77 (1978) 301
- (1978) Surf. Sci. , vol.77 , pp. 301
- Sayers, C.N.¹ Armstrong, N.R.²

14
- 11644297649
- Petrov P., Carlsson E.F., Larsson P., Friesel M., and Ivanov Z.G. J. Appl. Phys. 84 (1998) 3134
- (1998) J. Appl. Phys. , vol.84 , pp. 3134
- Petrov, P.¹ Carlsson, E.F.² Larsson, P.³ Friesel, M.⁴ Ivanov, Z.G.⁵

15
- 0032098113
- Sugii N., and Takagi K. Thin Solid Films 323 (1998) 63
- (1998) Thin Solid Films , vol.323 , pp. 63
- Sugii, N.¹ Takagi, K.²

16
- 34548097741
- Arlt G., Hennings D., and de With G. J. Appl. Phys. 58 (1985) 1619
- (1985) J. Appl. Phys. , vol.58 , pp. 1619
- Arlt, G.¹ Hennings, D.² de With, G.³

17
- 0027668451
- Horikawa T., Mikami N., Makita T., Tanimura J., Kataoka M., Sato K., and Nunoshita M. Jpn. J. Appl. Phys. 32 (1993) 4126
- (1993) Jpn. J. Appl. Phys. , vol.32 , pp. 4126
- Horikawa, T.¹ Mikami, N.² Makita, T.³ Tanimura, J.⁴ Kataoka, M.⁵ Sato, K.⁶ Nunoshita, M.⁷

18
- 65449154355
- Liang Y.C., and Liang Y.C. Scr. Mater. 61 (2009) 117
- (2009) Scr. Mater. , vol.61 , pp. 117
- Liang, Y.C.¹ Liang, Y.C.²

19
- 0000231055
- Streiffer S.K., Basceri C., Parker C.B., Lash S.E., and Kingon A.I. J. Appl. Phys. 86 (1999) 4565
- (1999) J. Appl. Phys. , vol.86 , pp. 4565
- Streiffer, S.K.¹ Basceri, C.² Parker, C.B.³ Lash, S.E.⁴ Kingon, A.I.⁵

20
- 0031170060
- Part 1
- Lee J., Choi Y.C., and Lee B.S. Jpn. J. Appl. Phys. 36 (1997) 3644 Part 1
- (1997) Jpn. J. Appl. Phys. , vol.36 , pp. 3644
- Lee, J.¹ Choi, Y.C.² Lee, B.S.³

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