Distributed and lumped element models for a bimorph-actuated micromirror

Journal of Micromechanics and Microengineering

Volumn 20, Issue 4, 2010, Pages

  Pal, Sagnik ^a   Xie, Huikai ^a  

^a University of Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED VOLTAGES; BIMORPH ACTUATOR; CIRCUIT MODELS; CURRENT FLOWS; ELECTRICAL TRANSMISSION; ELECTRO-THERMAL MODEL; EQUIVALENT CIRCUIT MODEL; FINITE ELEMENT SIMULATIONS; HEAT FLOWS; HEAT LOSS COEFFICIENTS; LENGTH SCALE; LUMPED ELEMENT MODEL; MICRO MIRROR; PER UNIT; POWER INPUT; ROTATION ANGLES; SCANNING MICROMIRROR; THERMAL MODEL; THERMAL POWER; THERMAL RESISTANCE; THERMOMECHANICAL MODEL;

HEAT LOSSES; MODELS; PLATINUM; ROTATION;

CIRCUIT THEORY;

EID: 77949901988     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/4/045020     Document Type: Article

References (21)

1. Lammel G et al 2002 Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators (Boston, MA: Kluwer) chapter 2 pp 27-66
2. Wu L and Xie H 2007 A 124 degree rotation angle electro-thermal micromirror with integrated platinum heater IEEE J. Sel. Top. Quantum Electron. 13 316-21
3. Pal S and Xie H 2009 Repeatability study of an electrothermally actuated micromirror Presented at 47th annual IEEE Int. Reliability Physics Symp. 2009 (Montreal) (doi:10.1109/JSTQE.2007.894066)
4. Pal S, Jia K, Maley S and Xie H 2008 Reduced order thermal modeling of a one-dimensional electrothermally actuated micromirror device SPIE Photonics West Conf. (San Jose, CA, 19-24 January 2008) (Proc. SPIE) 6885 68850B
5. Pal S and Xie H 2009 A parametric dynamic compact thermal model of an electrothermally actuated micromirror J. Micromech. Microeng. 19 065007
6. Zine-El-Abidine I, Okoniewski M and McRory J G 2005 Tunable radio frequency MEMS inductors with thermal bimorph actuators J. Micromech. Microeng. 15 2063-8
7. Yang J P, Deng X C and Chong T C 2005 An electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives J. Micromech. Microeng. 15 958-65
8. Bechtold T 2005 Model order reduction of electro-thermal MEMS PhD Thesis University of Freiburg, Germany
9. Hsu J T and Vu-Quoc L 1996 A rational formulation of thermal circuit models for electrothermal simulation: Part I. Finite element method IEEE Trans. Circuits Syst. 43 721-32
10. Christiaens F, Vandevelde B, Beyne E, Mertens R and Berghmans J 1998 A generic methodology for deriving compact dynamic thermal models, applied to the PSGA package IEEE Trans. Compon. Packag. Manuf. Technol. A 21 565-76
11. Todd S T and Huikai X 2008 An electrothermomechanical lumped element model of an electrothermal bimorph actuator J. Microelectromech. Syst. 17 213-25
12. Székely V and Rencz M 2000 Thermal dynamics and the time constant domain IEEE Trans. Compon. Packag. 23 587-94
13. Epoxy Technology (accessed 1 June 2009) http://www.epotek.com/
14. Timoshenko S 1925 Analysis of bi-metal thermostats J. Opt. Soc. Am. 11 233-56
15. COMSOL Finite element package (accessed 1 June 2009) http://www.comsol. com
16. IntelliSuite MEMS simulation package (accessed 1 June 2009) http://intellisensesoftware.com
17. Pelesko J A and Bernstein D H 2003 Modeling MEMS and NEMS (Boca Raton, FL: Chapman and Hall/CRC)
18. Kreith F and Bohn M S 1993 Principles of Heat Transfer 5th edn (New York: West Publishing Company)
19. Gonzalez G 1996 Microwave Transistor Amplifiers: Analysis and Design 2nd edn (Upper Saddle River, NJ: Prentice-Hall)
20. Valkenburg M E V 1974 Network Analysis 3rd edn (Englewood Cliffs, NJ: Prentice-Hall)
21. Ludwig R and Bogdanov G 2007 RF Circuit Design: Theory and Applications 2nd edn (Upper Saddle River, NJ: Prentice-Hall)