Morphology and bonding states of chemical vapor deposition diamond films nucleation surface

Applied Physics Letters

Volumn 96, Issue 10, 2010, Pages

  Shpilman, Z ^a,b   Gouzman, I ^a   Grossman, E ^a   Akhvlediani, R ^b   Hoffman, A ^b  

^a Soreq NRC ^*  (Israel)

^b TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

ACID ETCHING; BONDING STATE; CHEMICAL BONDINGS; CHEMICAL VAPOR DEPOSITION DIAMOND FILMS; DIAMOND SURFACES; GROWTH STAGES; HEXAGONAL DIAMOND; HEXAGONAL PATTERN; HIGH RESOLUTION ELECTRON ENERGY LOSS SPECTROSCOPY; MOSAIC STRUCTURE; PLASMA CLEANING; POLYCRYSTALLINE DIAMOND FILMS; SILICON SUBSTRATES;

ATOMIC FORCE MICROSCOPY; CHEMICAL BONDS; CHEMICAL CLEANING; CRACKS; CRYSTAL ATOMIC STRUCTURE; DESORPTION; DIAMONDS; ELECTRON ENERGY LOSS SPECTROSCOPY; ENERGY DISSIPATION; GRAIN BOUNDARIES; GRAIN GROWTH; MORPHOLOGY; NUCLEATION; SCANNING ELECTRON MICROSCOPY; SURFACE CLEANING; SURFACE STRUCTURE;

DIAMOND FILMS;

EID: 77949743309     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3352108     Document Type: Article

References (29)

1. J. E. Yater and A. Shih, J. Appl. Phys. 0021-8979 87, 8103 (2000). 10.1063/1.373505
2. Z. Shpilman, Sh. Michaelson, R. Kalish, and A. Hoffman, Diamond Relat. Mater. 0925-9635 15, 846 (2006). 10.1016/j.diamond.2005.10.060 (Pubitemid 43929273)
3. D. K. Reinhard, T. A. Grotjohn, M. Becker, M. K. Yaran, T. Schueelke, and J. Asmussen, J. Vac. Sci. Technol. B 1071-1023 22, 2811 (2004). 10.1116/1.1819928
4. L. I. Berger, Properties of Semiconductors in CRC Handbook of Chemistry and Physics, edited by, D. R. Lide, (CRC/Taylor and Francis, Boca Raton, 2009), 89th ed.
5. M. N. Yoder, Diamond: Potential and Status in Diamond and Diamond-like Films and Coatings, edited by, R. E. Clausing, L. L. Horton, J. C. Angus, and, P. Koidl, (Plenum, New York, 1990), p. 266.
6. P. J. Fallon and L. M. Brown, Diamond Relat. Mater. 0925-9635 2, 1004 (1993). 10.1016/0925-9635(93)90265-4
7. D. M. Malta, J. A. von Windheim, H. A. Wynands, and B. A. Fox, J. Appl. Phys. 0021-8979 77, 1536 (1995). 10.1063/1.358905
8. D. Takeuchi, H. Watanabe, S. S. Yamanaka, H. Okushi, H. Sawada, H. Ichinose, T. Sekiguchi, and K. Kajimura, Phys. Rev. B 0163-1829 63, 245328 (2001). 10.1103/PhysRevB.63.245328
9. G. H. M. Ma, B. E. Williams, J. T. Glass, and J. T. Prater, Diamond Relat. Mater. 0925-9635 1, 25 (1991). 10.1016/0925-9635(91)90008-X
10. J. Narayan, J. Mater. Res. 0884-2914 5, 2414 (1990). 10.1557/JMR.1990. 2414
11. D. Shechtman, A. Feldman, and J. Hutchinson, Mater. Lett. 0167-577X 17, 211 (1993). 10.1016/0167-577X(93)90001-E
12. D. Shechtman, J. Hutchinson, L. H. Robins, E. N. Frabaugh, and A. Feldman, J. Mater. Res. 0884-2914 8, 473 (1993). 10.1557/JMR.1993.0473
13. J. Michler, Y. von Kaenel, J. Stiegler, and E. Blank, J. Appl. Phys. 0021-8979 83, 187 (1998). 10.1063/1.366672
14. R. Akhvlediani, I. Lior, Sh. Michaelson, and A. Hoffman, Diamond Relat. Mater. 0925-9635 11, 545 (2002). 10.1016/S0925-9635(01)00646-X (Pubitemid 34696318)
15. M. C. Salvadori, M. Cattani, V. Mammana, O. R. Monteiro, J. W. Ager III, and I. G. Brown, Thin Solid Films 0040-6090 290-291, 157 (1996). 10.1016/S0040-6090(96)09010-4 (Pubitemid 126391080)
16. Z. Shpilman, I. Gouzman, E. Grossman, and A. Hoffman, J. Appl. Phys. 0021-8979 102, 114914 (2007). 10.1063/1.2818373 (Pubitemid 350262176)
17. Z. Shpilman, I. Gouzman, E. Grossman, R. Akhvlediani, and A. Hoffman, Appl. Phys. Lett. 0003-6951 92, 234103 (2008). 10.1063/1.2939561
18. S. T. Lee and G. Apai, Phys. Rev. B 0163-1829 48, 2684 (1993). 10.1103/PhysRevB.48.2684
19. J. Biener, A. Schenk, B. Winter, C. Lutterloh, U. A. Schubert, and J. Kuppers, Surf. Sci. Lett. 0167-2584 291, L725 (1993). 10.1016/0039-6028(93) 91466-3
20. J. Kinsky, R. Graupner, M. Stammler, and L. Ley, Diamond Relat. Mater. 0925-9635 11, 365 (2002). 10.1016/S0925-9635(01)00577-5 (Pubitemid 34703732)
21. D. O. Hummel, Atlas of Plastics Additives: Analysis by Spectrometric Methods (Springer, New York, 2002).
22. P. E. Pehrsson and T. W. Mercer, Surf. Sci. 0039-6028 460, 49 (2000). 10.1016/S0039-6028(00)00494-5
23. P. E. Pehrsson and T. W. Mercer, Surf. Sci. 0039-6028 460, 74 (2000). 10.1016/S0039-6028(00)00495-7
24. Z. Shpilman, I. Gouzman, E. Grossman, R. Akhvlediani, and A. Hoffman, Phys. Status Solidi A 0031-8965 205, 2130 (2008). 10.1002/pssa.200879708
25. Z. Shpilman, I. Gouzman, E. Grossman, L. Shen, T. K. Minton, R. Akhvlediani, and A. Hoffman, "CVD Diamond Oxidation by Thermal and Hyperthermal Atomic Oxygen," (to be published).
26. J. C. Angus, M. Sunkara, S. R. Sahaida, and J. T. Glass, J. Mater. Res. 0884-2914 7, 3001 (1992). 10.1557/JMR.1992.3001
27. K. Hirabayashi and S. Matsumoto, J. Appl. Phys. 0021-8979 75, 1151 (1994). 10.1063/1.356500
28. Z. Shpilman, I. Gouzman, E. Grossman, L. Shen, T. K. Minton, and A. Hoffman, Appl. Phys. Lett. 0003-6951 95, 174106 (2009). 10.1063/1.3251789
29. C. T. Kuo, C. R. Lin, and H. M. Lien, Thin Solid Films 0040-6090 290-291, 254 (1996). 10.1016/S0040-6090(96)09016-5 (Pubitemid 126391099)