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Physica Status Solidi (A) Applications and Materials Science

Volumn 205, Issue 9, 2008, Pages 2130-2135

Chemical and morphological aspects of diamond film oxidation and regeneration

(5) Shpilman, Z a,b Gouzman, I a Grossman, E a Akhvlediani, R b Hoffman, A b

a SOREQ NUCLEAR RESEARCH CENTER (Israel)

b TECHNION ISRAEL INSTITUTE OF TECHNOLOGY (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCES; ATOMIC OXYGENS; CHEMICAL COMPOSITIONS; CVD DIAMOND FILMS; DIAMOND SURFACES; EROSION YIELDS; EX-SITU; FILM OXIDATIONS; GRAIN SIZES; GRANULAR; HIGH RESOLUTION ELECTRON ENERGY LOSSES; HIGH VACUUMS; HOT FILAMENTS; HYDROGEN PLASMAS; HYDROGEN TREATMENTS; IN-SITU; MORPHOLOGICAL ASPECTS; MORPHOLOGICAL EFFECTS; OPTICAL PHONONS; OXYGEN PLASMA EXPOSURES; OXYGEN PLASMAS; PLASMA TREATMENTS; PREFERENTIAL ETCHINGS; REGENERATION MECHANISMS; SELECTIVE ETCHINGS; SURFACE BONDINGS; TAPPING MODES; UNSATURATED HYDROCARBONS; UPPER SURFACES;

ANNEALING; ARCTIC ENGINEERING; ATOMIC PHYSICS; ATOMIC SPECTROSCOPY; ATOMS; CHEMICAL OXYGEN DEMAND; CHEMICAL VAPOR DEPOSITION; DIAMOND CUTTING TOOLS; DIAMOND FILMS; DIAMONDS; ELECTRON ENERGY LOSS SPECTROSCOPY; ENERGY DISSIPATION; ETCHING; HIGH RESOLUTION ELECTRON MICROSCOPY; HYDROCARBONS; HYDROGEN; NONMETALS; ORGANIC COMPOUNDS; OXIDATION; OXYGEN; PLASMA APPLICATIONS; PLASMAS; SURFACE TREATMENT;

SURFACE MORPHOLOGY;

EID: 54249125029 PISSN: 18626300 EISSN: 18626319 Source Type: Journal
DOI: 10.1002/pssa.200879708 Document Type: Conference Paper

Times cited : (8)

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