Profile error compensation in ultra-precision grinding of aspheric surfaces with on-machine measurement

International Journal of Machine Tools and Manufacture

Volumn 50, Issue 5, 2010, Pages 480-486

  Chen, F J ^a   Yin, S H ^a   Huang, H ^b   Ohmori, H ^c   Wang, Y ^a   Fan, Y F ^a   Zhu, Y J ^a  

^a HUNAN UNIVERSITY   (China)

^b UNIVERSITY OF QUEENSLAND   (Australia)

^c INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

Aspheric surface; Error compensation; Nanogrinding; On machine measurement; Residual error

Indexed keywords

ASPHERIC SURFACES; NANO-GRINDING; NEW TOOLS; NORMAL DIRECTION; ON MACHINE MEASUREMENT; PROFILE DATA; PROFILE ERROR; PROFILOMETERS; ULTRAPRECISION GRINDING; WORK PIECES;

ASPHERICS; GRINDING (COMMINUTION); GRINDING (MACHINING); GRINDING MILLS; MEASUREMENTS; TUNGSTEN; TUNGSTEN CARBIDE;

ERROR COMPENSATION;

EID: 77949659133     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2010.01.001     Document Type: Article

References (23)

1. Lin Y., and Huang H. Brittle materials in nano-abrasive fabrication of optical mirror-surfaces. Precision Engineering 32 (2008) 336-341
2. Rao V.S., and Rao P.V.M. Tool deflection compensation in peripheral milling of curved geometries. International Journal of Machine Tools and Manufacture 46 (2006) 2036-2043
3. Yin L., Vancoille E.Y.J., Ramesh K., and Huang H. Surface characterization of 6H-SiC (0 0 0 1) substrates in indentation and abrasive machining. International Journal of Machine Tools and Manufacture 44 (2004) 607-615
4. Fang F.Z., Zhang X.D., and Hu X.T. Cylindrical coordinate machining of optical freeform surfaces. Optics Express 16 (2008) 7323-7329
5. Yin L., Spowage A., Ramesh K., Huang H., Pickering J.P., and Vancoille E.Y.J. Influence of microstructure on ultraprecision grinding of cemented carbides. International Journal of Machine Tools and Manufacture 44 (2004) 533-543
6. Chen W.K., Kuriyagawa T., Huang H., and Yosihara N. Machining of micro aspherical mould inserts. Precision Engineering 29 (2005) 315-323
7. Yin L., Vancoille E.Y.J., Lee L.C., Huang H., Ramesh K., and Liu X.D. High-quality grinding of polycrystalline silicon carbide spherical surfaces. Wear 256 (2004) 197-207
8. Lo C.C., and Hsiao C.Y. A method of tool path compensation for repeated machining process. International Journal of Machine Tools and Manufacture 38 (1998) 205-213
9. Fines J.M., and Agah A. Machine tool positioning error compensation using artificial neural networks. Engineering Applications of Artificial Intelligence 21 (2008) 1013-1026
10. Suzuki H., Tanaka K., Takeda H., Kawakami K., and Nishioka M. Study on precision grinding of micro aspherical surface: effects of tool errors on workpiece form accuracies and its compensation methods. Journal of the Japan Society for Precision Engineering 65 (1999) 401-405
11. Katsushi F., Nguyen T.H., Noriyuki O., and Takashi N. Automatic compensation for grinding wheel wear by pressure based in-process measurement in wet grinding. Precision Engineering 27 (2003) 9-13
12. Pereira P.H., and Giacomo B.D. Thermal error evaluation and modelling of a CNC cylindrical grinding machine. Metrologia 45 (2008) 217-222
13. Chen W.K., Kuriyagawa T., Huang H., Ono H., Saeki M., and Syoji K. A novel form error compensation technique for tungsten carbide mould insert machining utilizing parallel grinding technology. Key Engineering Materials 257-258 (2004) 141-146
14. Huang H., Chen W.K., and Kuriyagawa T. Profile error compensation approaches for parallel nanogrinding of aspheric mould inserts. International Journal of Machine Tools and Manufacture 47 (2007) 2237-2245
15. Kim S.H., Ko T.J., and Ahn J.H. Elimination of settling error due to clamping forces in on-machine measurement. International Journal of Advanced Manufacturing Technology 19 (2002) 573-578
16. Feng J., Kim B.S., Shih A., and Ni J. Tool wear monitoring for micro-end grinding of ceramic materials. Journal of Materials Processing Technology 209 (2009) 5110-5116
17. Yi L., Funkenbusch P.D., Gracewski S.M., and Ruckman J. Tool wear and profile development in contour grinding of optical components. International Journal of Machine Tools and Manufacture 44 (2004) 427-438
18. Neugebauera R., Hessb K.U., Gleicha S., and POP S. Reducing tool wear in abrasive cutting. International Journal of Machine Tools and Manufacture 45 (2005) 1120-1123
19. Raja J., Muralikrishna B., and Fu S.Y. Recent advances in separation of roughness waviness and form. Precision Engineering 26 (2002) 222-235
20. Krystek M. A fast Gauss filtering algorithm for roughness measurements. Precision Engineering 19 (1996) 198-200
21. Cleveland W.S. Robust locally weighted regression and smoothing scatter plots. Journal of the American Statistics Society 74 (1979) 829-836
22. Brinkmann S., Bodschwinna H., and Lemke H.W. Accessing roughness in three-dimensions using Gaussian regression filtering. International Journal of Machine Tools and Manufacture 41 (2001) 2153-2161
23. Lei W.T., and Sung M.P. NURBS-based fast geometric error compensation for CNC machine tools. International Journal of Machine Tools and Manufacture 48 (2008) 307-319