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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 28, Issue 2, 2010, Pages 314-321

Combinatorial characterization of transparent conductive properties of Ga-doped ZnO films cosputtered from electron cyclotron resonance and rf magnetron plasma sources

(1) Akazawa, Housei a

a NTT CORPORATION (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE DOMAINS; DEPOSITION TEMPERATURES; ELECTRICAL AND OPTICAL PROPERTIES; ELEVATED TEMPERATURE; GA-DOPED ZNO; IONIZED IMPURITY SCATTERING; OPTICAL TRANSMITTANCE; RF MAGNETRONS; SILICA GLASS SUBSTRATE; SOLUBILITY LIMITS; SUBSTRATE SURFACE; TRANSPARENT CONDUCTIVE; VISIBLE WAVELENGTHS; ZNO;

BIOACTIVITY; CARRIER CONCENTRATION; CARRIER MOBILITY; CONDUCTIVE FILMS; CYCLOTRONS; ELECTRIC PROPERTIES; ELECTRON CYCLOTRON RESONANCE; GALLIUM; MAGNETRONS; OPTICAL FILMS; OPTICAL PROPERTIES; PLASMA SOURCES; RESONANCE; SILICA; SUBSTRATES; X RAY DIFFRACTION; ZINC; ZINC OXIDE;

GALLIUM ALLOYS;

EID: 77949422514 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3328053 Document Type: Article

Times cited : (23)

References (25)

1
- 36549099749
- JAPIAU 0021-8979,. 10.1063/1.337534
- I. Hamberg and C. G. Granqvist, J. Appl. Phys. JAPIAU 0021-8979 60, R123 (1986). 10.1063/1.337534
- (1986) J. Appl. Phys. , vol.60 , pp. 123
- Hamberg, I.¹ Granqvist, C.G.²

2
- 0242454090
- JAPIAU 0021-8979,. 10.1063/1.350931
- Y. Shigesato, S. Takaki, and T. Haranoh, J. Appl. Phys. JAPIAU 0021-8979 71, 3356 (1992). 10.1063/1.350931
- (1992) J. Appl. Phys. , vol.71 , pp. 3356
- Shigesato, Y.¹ Takaki, S.² Haranoh, T.³

3
- 0022146289
- JAPLD8 0021-4922,. 10.1143/JJAP.24.L781
- T. Minami, H. Sato, H. Nanto, and S. Takata, Jpn. J. Appl. Phys., Part 2 JAPLD8 0021-4922 24, L781 (1985). 10.1143/JJAP.24.L781
- (1985) Jpn. J. Appl. Phys., Part 2 , vol.24 , pp. 781
- Minami, T.¹ Sato, H.² Nanto, H.³ Takata, S.⁴

4
- 0025592599
- THSFAP 0040-6090,. 10.1016/0040-6090(90)90223-Z
- B. H. Choi and H. B. Im, Thin Solid Films THSFAP 0040-6090 193-194, 712 (1990). 10.1016/0040-6090(90)90223-Z
- (1990) Thin Solid Films , vol.193-194 , pp. 712
- Choi, B.H.¹ Im, H.B.²

5
- 33748266458
- APPLAB 0003-6951,. 10.1063/1.2337542
- O. Nakagawara, Y. Kishimoto, H. Seto, Y. Koshido, Y. Yoshino, and T. Makino, Appl. Phys. Lett. APPLAB 0003-6951 89, 091904 (2006). 10.1063/1.2337542
- (2006) Appl. Phys. Lett. , vol.89 , pp. 091904
- Nakagawara, O.¹ Kishimoto, Y.² Seto, H.³ Koshido, Y.⁴ Yoshino, Y.⁵ Makino, T.⁶

6
- 0037157408
- THSFAP 0040-6090,. 10.1016/S0040-6090(02)00192-X
- P. K. Song, M. Watanabe, M. Kon, A. Mitsui, and Y. Shigesato, Thin Solid Films THSFAP 0040-6090 411, 82 (2002). 10.1016/S0040-6090(02)00192-X
- (2002) Thin Solid Films , vol.411 , pp. 82
- Song, P.K.¹ Watanabe, M.² Kon, M.³ Mitsui, A.⁴ Shigesato, Y.⁵

7
- 0001138580
- JAPIAU 0021-8979,. 10.1063/1.351977
- J. Hu and R. G. Gordon, J. Appl. Phys. JAPIAU 0021-8979 72, 5381 (1992). 10.1063/1.351977
- (1992) J. Appl. Phys. , vol.72 , pp. 5381
- Hu, J.¹ Gordon, R.G.²

8
- 0029308260
- THSFAP 0040-6090,. 10.1016/0040-6090(94)09485-3
- B. M. Ataev, A. M. Bagamadova, A. M. Djabrailov, V. V. Mamedov, and R. A. Rabadanov, Thin Solid Films THSFAP 0040-6090 260, 19 (1995). 10.1016/0040-6090(94)09485-3
- (1995) Thin Solid Films , vol.260 , pp. 19
- Ataev, B.M.¹ Bagamadova, A.M.² Djabrailov, A.M.³ Mamedov, V.V.⁴ Rabadanov, R.A.⁵

9
- 5844235614
- JVTAD6 0734-2101,. 10.1116/1.580430
- Y. Li, G. S. Tompa, S. Liang, C. Gorla, Y. Lu, and J. Doyle, J. Vac. Sci. Technol. A JVTAD6 0734-2101 15, 1063 (1997). 10.1116/1.580430
- (1997) J. Vac. Sci. Technol. A , vol.15 , pp. 1063
- Li, Y.¹ Tompa, G.S.² Liang, S.³ Gorla, C.⁴ Lu, Y.⁵ Doyle, J.⁶

10
- 0000679515
- JVTAD6 0734-2101,. 10.1116/1.580391
- G. A. Hirata, J. McKittrick, J. Siqueiros, O. A. Lopez, T. Cheeks, O. Contreras, and J. Y. Yi, J. Vac. Sci. Technol. A JVTAD6 0734-2101 14, 791 (1996). 10.1116/1.580391
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 791
- Hirata, G.A.¹ McKittrick, J.² Siqueiros, J.³ Lopez, O.A.⁴ Cheeks, T.⁵ Contreras, O.⁶ Yi, J.Y.⁷

11
- 0002816338
- JAPLD8 0021-4922,. 10.1143/JJAP.38.L71
- A. Suzuki, T. Matsushita, T. Aoki, Y. Yoneyama, and M. Okuda, Jpn. J. Appl. Phys., Part 2 JAPLD8 0021-4922 38, L71 (1999). 10.1143/JJAP.38.L71
- (1999) Jpn. J. Appl. Phys., Part 2 , vol.38 , pp. 71
- Suzuki, A.¹ Matsushita, T.² Aoki, T.³ Yoneyama, Y.⁴ Okuda, M.⁵

12
- 0037009721
- THSFAP 0040-6090,. 10.1016/S0040-6090(02)00706-X
- T. Minami, S. Ida, and T. Miyata, Thin Solid Films THSFAP 0040-6090 416, 92 (2002). 10.1016/S0040-6090(02)00706-X
- (2002) Thin Solid Films , vol.416 , pp. 92
- Minami, T.¹ Ida, S.² Miyata, T.³

13
- 10744232586
- THSFAP 0040-6090,. 10.1016/j.tsf.2003.10.095
- K. Iwata, Thin Solid Films THSFAP 0040-6090 451-452, 219 (2004). 10.1016/j.tsf.2003.10.095
- (2004) Thin Solid Films , vol.451-452 , pp. 219
- Iwata, K.¹

14
- 17644449062
- THSFAP 0040-6090,. 10.1016/j.tsf.2003.10.138
- T. Yamamoto, T. Sakemi, K. Awai, and S. Shirakata, Thin Solid Films THSFAP 0040-6090 451-452, 439 (2004). 10.1016/j.tsf.2003.10.138
- (2004) Thin Solid Films , vol.451-452 , pp. 439
- Yamamoto, T.¹ Sakemi, T.² Awai, K.³ Shirakata, S.⁴

15
- 33644550605
- SUMIEK 0749-6036,. 10.1016/j.spmi.2005.08.007
- T. Yamamoto, Superlattices Microstruct. SUMIEK 0749-6036 38, 369 (2005). 10.1016/j.spmi.2005.08.007
- (2005) Superlattices Microstruct. , vol.38 , pp. 369
- Yamamoto, T.¹

16
- 29344455291
- SUMIEK 0749-6036,. 10.1016/j.spmi.2005.08.045
- S. Shirakata, T. Sakemi, K. Awai, and T. Yamamoto, Superlattices Microstruct. SUMIEK 0749-6036 39, 218 (2006). 10.1016/j.spmi.2005.08.045
- (2006) Superlattices Microstruct. , vol.39 , pp. 218
- Shirakata, S.¹ Sakemi, T.² Awai, K.³ Yamamoto, T.⁴

17
- 34547689095
- APPLAB 0003-6951,. 10.1063/1.2767213
- T. Yamada, A. Miyake, S. Kishimoto, H. Makino, N. Yamamoto, and T. Yamamoto, Appl. Phys. Lett. APPLAB 0003-6951 91, 051915 (2007). 10.1063/1.2767213
- (2007) Appl. Phys. Lett. , vol.91 , pp. 051915
- Yamada, T.¹ Miyake, A.² Kishimoto, S.³ Makino, H.⁴ Yamamoto, N.⁵ Yamamoto, T.⁶

18
- 36048968887
- SCTEEJ 0257-8972,. 10.1016/j.surfcoat.2007.05.051
- T. Yamada, A. Miyake, S. Kishimoto, H. Makino, N. Yamamoto, and T. Yamamoto, Surf. Coat. Technol. SCTEEJ 0257-8972 202, 973 (2007). 10.1016/j.surfcoat.2007.05.051
- (2007) Surf. Coat. Technol. , vol.202 , pp. 973
- Yamada, T.¹ Miyake, A.² Kishimoto, S.³ Makino, H.⁴ Yamamoto, N.⁵ Yamamoto, T.⁶

19
- 34548514488
- SUMIEK 0749-6036,. 10.1016/j.spmi.2007.04.041
- K. Saito, Y. Hiratsuka, A. Omata, H. Makino, S. Kishimoto, T. Yamamoto, N. Horiuchi, and H. Hirayama, Superlattices Microstruct. SUMIEK 0749-6036 42, 172 (2007). 10.1016/j.spmi.2007.04.041
- (2007) Superlattices Microstruct. , vol.42 , pp. 172
- Saito, K.¹ Hiratsuka, Y.² Omata, A.³ Makino, H.⁴ Kishimoto, S.⁵ Yamamoto, T.⁶ Horiuchi, N.⁷ Hirayama, H.⁸

20
- 69549107750
- THSFAP 0040-6090,. 10.1016/j.tsf.2009.06.008
- H. Akazawa, Thin Solid Films THSFAP 0040-6090 518, 22 (2009). 10.1016/j.tsf.2009.06.008
- (2009) Thin Solid Films , vol.518 , pp. 22
- Akazawa, H.¹

21
- 0022113552
- JAPNDE 0021-4922,. 10.1143/JJAP.24.944
- K. Tominaga, T. Yuasa, M. Kume, and O. Tada, Jpn. J. Appl. Phys., Part 1 JAPNDE 0021-4922 24, 944 (1985). 10.1143/JJAP.24.944
- (1985) Jpn. J. Appl. Phys., Part 1 , vol.24 , pp. 944
- Tominaga, K.¹ Yuasa, T.² Kume, M.³ Tada, O.⁴

22
- 68949146775
- APECE4 1882-0778,. 10.1143/APEX.2.081601
- H. Akazawa, Appl. Phys. Express APECE4 1882-0778 2, 081601 (2009). 10.1143/APEX.2.081601
- (2009) Appl. Phys. Express , vol.2 , pp. 081601
- Akazawa, H.¹

23
- 0003998388
- 79th ed. (CRC, Boca Raton).
- D. R. Lide, CRC Handbook of Chemistry and Physics, 79th ed. (CRC, Boca Raton, 1998).
- (1998) CRC Handbook of Chemistry and Physics
- Lide, D.R.¹

24
- 27844459824
- THSFAP 0040-6090,. 10.1016/j.tsf.2005.07.179
- M. Osada, T. Sakemi, and T. Yamamoto, Thin Solid Films THSFAP 0040-6090 494, 38 (2006). 10.1016/j.tsf.2005.07.179
- (2006) Thin Solid Films , vol.494 , pp. 38
- Osada, M.¹ Sakemi, T.² Yamamoto, T.³

25
- 0000551578
- APPLAB 0003-6951,. 10.1063/1.1330559
- H. Orita, H. Ohta, M. Hirano, and H. Hosono, Appl. Phys. Lett. APPLAB 0003-6951 77, 4166 (2000). 10.1063/1.1330559
- (2000) Appl. Phys. Lett. , vol.77 , pp. 4166
- Orita, H.¹ Ohta, H.² Hirano, M.³ Hosono, H.⁴

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