SCOPUS 정보 검색 플랫폼

Applied Physics Express

Volumn 2, Issue 8, 2009, Pages

Argon plasma treatment of transparent conductive zno films

(1) Akazawa, Housei a

a NTT CORPORATION (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARRIER CONCENTRATION; CONDUCTIVE FILMS; CRYSTALLITES; CYCLOTRONS; HALL MOBILITY; II-VI SEMICONDUCTORS; IRRADIATION; METALLIC FILMS; THICK FILMS; ZINC OXIDE;

ARGON PLASMA TREATMENT; ARGON PLASMAS; CONDUCTIVE PROPERTIES; ELECTRON-CYCLOTRON RESONANCE; FILM REDUCTION; HIGH RESISTIVITY; IRRADIATION TIME; TRANSPARENT CONDUCTIVE; VISIBLE WAVELENGTHS; ZNO FILMS;

ELECTRON CYCLOTRON RESONANCE;

EID: 68949146775 PISSN: 18820778 EISSN: 18820786 Source Type: Journal
DOI: 10.1143/apex.2.081601 Document Type: Article

Times cited : (14)

References (21)

1
- 0018495392
- J. Aranovich, A. Ortiz, and R. H. Bube: J. Vac. Sci. Technol. 16 (1979) 994
- (1979) J Vac Sci Technol , vol.16 , pp. 994
- Aranovich, J.¹ Ortiz, A.² Bube, R.H.³

2
- 0000475707
- P. Nunes, B. Fernandes, E. Fortunato, P. Vilarinho, and R. Martins: Thin Solid Films 337 (1999) 176
- (1999) Thin Solid Films , vol.337 , pp. 176
- Nunes, P.¹ Fernandes, B.² Fortunato, E.³ Vilarinho, P.⁴ Martins, R.⁵

3
- 10644295763
- M. de la L. Olvera, A. Maldonado, R. Asomoza, and S. Tirado-Guerra: Thin Solid Films 411 (2002) 198
- (2002) Thin Solid Films , vol.411 , pp. 198
- De La, M.¹ Olvera, L.² Maldonado, A.³ Asomoza, R.⁴ Tirado-Guerra, S.⁵

4
- 15844381938
- F. K. Shan, G. X. Liu, W. J. Lee, G. H. Lee, I. S. Kim, B. C. Shin, and Y. C. Kim: J. Cryst. Growth 277 (2005) 284
- (2005) J Cryst Growth , vol.277 , pp. 284
- Shan, F.K.¹ Liu, G.X.² Lee, W.J.³ Lee, G.H.⁴ Kim, I.S.⁵ Shin, B.C.⁶ Kim, Y.C.⁷

5
- 33747872346
- J. B. Webb, D. F. Williams, and M. Buchanan: Appl Phys Lett. 39 (1981) 640
- (1981) Appl Phys Lett , vol.39 , pp. 640
- Webb, J.B.¹ Williams, D.F.² Buchanan, M.³

6
- 36749104834
- T. Minami, H. Nanto, and S. Takata: Appl Phys Lett. 41 (1982) 958
- (1982) Appl Phys Lett , vol.41 , pp. 958
- Minami, T.¹ Nanto, H.² Takata, S.³

7
- 33751203564
- S. Kishimoto, T. Yamada, K. Ikeda, H. Makino, and T. Yamamoto: Surf. Coat. Technol. 201 (2006) 4000
- (2006) Surf Coat Technol , vol.201 , pp. 4000
- Kishimoto, S.¹ Yamada, T.² Ikeda, K.³ Makino, H.⁴ Yamamoto, T.⁵

8
- 0042706766
- A. Y. Polyakov, N. B. Smimov, A. V. Govorkov, K. I. M. E. Overberg, Y. W. Heo, D. P. Norton, S. J. Pearton, B. Luo, F. Ren, and J. M. Zavada: J. Appl Phys 94 (2003) 400
- (2003) J Appl Phys , vol.94 , pp. 400
- Polyakov, A.Y.¹ Smimov, N.B.² Govorkov, A.V.³ Overberg, K.I.M.E.⁴ Heo, Y.W.⁵ Norton, D.P.⁶ Pearton, S.J.⁷ Luo, B.⁸ Ren, F.⁹ Zavada, J.M.¹⁰

9
- 0037455097
- K. I. M. E. Overberg, Y. W. Heo, D. P. Norton, S. J. Pearton, C. E. Stutz, B. Luo, F. Ren, D. C. Look, and J. M. Zavada: Appl Phys Lett. 82 (2003) 385
- (2003) Appl Phys Lett , vol.82 , pp. 385
- Overberg, K.I.M.E.¹ Heo, Y.W.² Norton, D.P.³ Pearton, S.J.⁴ Stutz, C.E.⁵ Luo, B.⁶ Ren, F.⁷ Look, D.C.⁸ Zavada, J.M.⁹

10
- 20844437237
- C. C. Lin, H. P. Chen, H. C. Liao, and S. Y. Chen: Appl Phys Lett. 86 (2005) 183103
- (2005) Appl Phys Lett , vol.86 , pp. 183103
- Lin, C.C.¹ Chen, H.P.² Liao, H.C.³ Chen, S.Y.⁴

11
- 31144463294
- J. Yoo, W. II Park, and G. C. Yi: J. Vac. Sci. Technol. B 23 (2005) 1970
- (2005) J Vac Sci Technol B , vol.23 , pp. 1970
- Yoo, J.¹ Park, W.I.I.² Yi, G.C.³

12
- 33748144907
- To be Published in
- H. Akazawa: to be published in Thin Solid Films
- Thin Solid Films
- Akazawa, H.¹

13
- 34249049422
- S. Kishimoto, K. Hayashi, H. Hamaguchi, H. Makino, T. Yamada, A. Miyake, and T. Yamamoto: Phys Status Solidi B 244 (2007) 1483
- (2007) Phys Status Solidi B , vol.244 , pp. 1483
- Kishimoto, S.¹ Hayashi, K.² Hamaguchi, H.³ Makino, H.⁴ Yamada, T.⁵ Miyake, A.⁶ Yamamoto, T.⁷

14
- 34548512830
- T. Yamada, T. Nebiki, S. Kishimoto, H. Makino, K. Awai, T. Narusawa, and T. Yamamoto: Superlattices Microstruct. 42 (2007) 68
- (2007) Superlattices Microstruct , vol.42 , pp. 68
- Yamada, T.¹ Nebiki, T.² Kishimoto, S.³ Makino, H.⁴ Awai, K.⁵ Narusawa, T.⁶ Yamamoto, T.⁷

15
- 27844459824
- M. Osada, T. Sakemi, and T. Yamamoto: Thin Solid Films 494 (2006) 38
- (2006) Thin Solid Films , vol.494 , pp. 38
- Osada, M.¹ Sakemi, T.² Yamamoto, T.³

16
- 0004369501
- W. M. Lau, I. Bello, L. J. Huang, X. Feng, M. Vos, and I. V. Mitchel: J. Appl Phys 74 (1993) 7101
- (1993) J Appl Phys , vol.74 , pp. 7101
- Lau, W.M.¹ Bello, I.² Huang, L.J.³ Feng, X.⁴ Vos, M.⁵ Mitchel, I.V.⁶

17
- 0011292849
- J. S. Pan, A. T. S. Wee, C. H. A. Huan, H. S. Tan, and K. L. Tan: J. Appl Phys 80 (1996) 6655
- (1996) J Appl Phys , vol.80 , pp. 6655
- Pan, J.S.¹ Wee, A.T.S.² Huan, C.H.A.³ Tan, H.S.⁴ Tan, K.L.⁵

18
- 11744288688
- J. D. Beckerle, A. D. Johnson, and S. T. Ceyer: Phys Rev Lett. 62 (1989) 685
- (1989) Phys Rev Lett , vol.62 , pp. 685
- Beckerle, J.D.¹ Johnson, A.D.² Ceyer, S.T.³

19
- 0031502461
- B. A. Helmer and D. B. Graves: J. Vac. Sci. Technol. A 15 (1997) 2252
- (1997) J Vac Sci Technol A , vol.15 , pp. 2252
- Helmer, B.A.¹ Graves, D.B.²

20
- 0001476814
- L. Vattuone, P. Gambardella, U. Burghaus, F. Cemic, A. Cupolillo, U. Valbusa, and M. Rocca: J. Chem. Phys 109 (1998) 2490
- (1998) J Chem Phys , vol.109 , pp. 2490
- Vattuone, L.¹ Gambardella, P.² Burghaus, U.³ Cemic, F.⁴ Cupolillo, A.⁵ Valbusa, U.⁶ Rocca, M.⁷

21
- 0022023527
- D. Menzel: Nucl. Instrum. Methods Phys Res., Sect. B 13 (1986) 507
- (1986) Nucl Instrum Methods Phys Res Sect B , vol.13 , pp. 507
- Menzel, D.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.