Strain sensing with submicron Al- AlOx -Al tunnel junctions

Review of Scientific Instruments

Volumn 81, Issue 2, 2010, Pages

  Koppinen, P J ^a   Lievonen, J T ^a   Ahlskog, M ^a   Maasilta, I J ^a  

^a UNIVERSITY OF JYVÄSKYLÄ   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED STRAIN; ATOMIC FORCE MICROSCOPES; GAUGE FACTORS; LOCAL STRAINS; MASS SENSING; NANO ELECTROMECHANICAL SYSTEMS; SILICON NITRIDE MEMBRANE; STATIC STRAIN; STRAIN SENSING; STRAIN SENSORS; SUBMICRON; TUNNELING RESISTANCE;

ALUMINUM; SILICON NITRIDE; WIND TUNNELS;

TUNNEL JUNCTIONS;

EID: 77949308980     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3298582     Document Type: Conference Paper

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