Physical vs photolithographic patterning of plasma polymers: An investigation by ToF-SSIMS and multivariate analysis

Langmuir

Volumn 26, Issue 5, 2010, Pages 3720-3730

  Mishra, Gautam ^a,c   Easton, Christopher D ^b   McArthur, Sally L ^b  

^a UNIVERSITY OF SHEFFIELD   (United Kingdom)

^b SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

^c Kratos Analytical Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACRYLIC ACIDS; AFM; ALLYL AMINE; ANALYTICAL TECHNIQUES; ATOMIC FORCE; BIOARRAYS; BIOMEDICAL APPLICATIONS; CHEMICAL PATTERN; CHEMICAL RESOLUTION; MICROPATTERNS; MULTI VARIATE ANALYSIS; PATTERNING TECHNIQUES; PHOTOLITHOGRAPHIC PATTERNING; PLASMA POLYMERS; PLASMA SPECIES; PLASMA SYSTEMS; REGION OF INTEREST; ROI ANALYSIS; SPATIAL RESOLUTION; STATIC SECONDARY ION MASS SPECTROMETRIES; SUBSTRATE MATERIAL; TEM; TIME OF FLIGHT;

CARBOXYLIC ACIDS; CELL CULTURE; CHEMICAL ANALYSIS; DECISION MAKING; FABRICATION; ORGANIC ACIDS; PLASMAS; POLYMERS; PRINCIPAL COMPONENT ANALYSIS; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; SURFACE CHEMISTRY; TRANSMISSION ELECTRON MICROSCOPY;

MULTIVARIANT ANALYSIS;

ACRYLIC ACID; ACRYLIC ACID DERIVATIVE; ALLYLAMINE; EPOXIDE; ETHYLENE GLYCOL DERIVATIVE; GLYCIDYL METHACRYLATE; MALEIC ANHYDRIDE; METHACRYLIC ACID DERIVATIVE; POLYMER; TETRAGLYME;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMISTRY; MASS SPECTROMETRY; MULTIVARIATE ANALYSIS; PHYSICAL CHEMISTRY; PRINCIPAL COMPONENT ANALYSIS;

ACRYLATES; ALLYLAMINE; EPOXY COMPOUNDS; ETHYLENE GLYCOLS; MALEIC ANHYDRIDES; MASS SPECTROMETRY; METHACRYLATES; MICROSCOPY, ATOMIC FORCE; MULTIVARIATE ANALYSIS; PHYSICOCHEMICAL PROCESSES; POLYMERS; PRINCIPAL COMPONENT ANALYSIS;

EID: 77749317498     PISSN: 07437463     EISSN: 15205827     Source Type: Journal    
DOI: 10.1021/la902930z     Document Type: Article

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