Surface modification by plasma etching and plasma patterning

Journal of Physical Chemistry B

Volumn 101, Issue 46, 1997, Pages 9548-9554

  Dai, Liming ^a   Griesser, Hans J ^a   Mau, Albert W H ^a  

^a CSIRO   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPOLYMERIZATION; FILM PREPARATION; GLOW DISCHARGES; MASKS; MONOMERS; PLASMA ETCHING;

PLASMA PATTERNING; PLASMA POLYMERIZATION;

CONDUCTIVE FILMS;

EID: 0031272709     PISSN: 15206106     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp970562d     Document Type: Article

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