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Volumn 16, Issue 6, 2009, Pages 925-928
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Preferential orientation growth of aln thin films on Si(111) substrates by plasma-assisted molecular beam epitaxy
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Author keywords
AlN; FTIR; MBE; Si
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Indexed keywords
ALN;
ALN THIN FILMS;
EPITAXIALLY GROWN;
FTIR;
HIGH-RESOLUTION X-RAY DIFFRACTION;
MICRO RAMAN SPECTROSCOPY;
MICRO-RAMAN;
PHONON FREQUENCIES;
PLASMA-ASSISTED MOLECULAR BEAM EPITAXY;
PREFERENTIAL ORIENTATION;
RAMAN MODES;
SI (1 1 1);
SI(111) SUBSTRATE;
XRD MEASUREMENTS;
CRYSTAL GROWTH;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
MOLECULAR BEAM EPITAXY;
MOLECULAR BEAMS;
MOLECULAR ORIENTATION;
RAMAN SPECTROSCOPY;
SEMICONDUCTOR QUANTUM WIRES;
SILICON;
SUBSTRATES;
X RAY DIFFRACTION;
SEMICONDUCTING SILICON COMPOUNDS;
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EID: 77749292323
PISSN: 0218625X
EISSN: None
Source Type: Journal
DOI: 10.1142/S0218625X09013499 Document Type: Article |
Times cited : (3)
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References (11)
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