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Volumn 16, Issue 6, 2009, Pages 925-928

Preferential orientation growth of aln thin films on Si(111) substrates by plasma-assisted molecular beam epitaxy

Author keywords

AlN; FTIR; MBE; Si

Indexed keywords

ALN; ALN THIN FILMS; EPITAXIALLY GROWN; FTIR; HIGH-RESOLUTION X-RAY DIFFRACTION; MICRO RAMAN SPECTROSCOPY; MICRO-RAMAN; PHONON FREQUENCIES; PLASMA-ASSISTED MOLECULAR BEAM EPITAXY; PREFERENTIAL ORIENTATION; RAMAN MODES; SI (1 1 1); SI(111) SUBSTRATE; XRD MEASUREMENTS;

EID: 77749292323     PISSN: 0218625X     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0218625X09013499     Document Type: Article
Times cited : (3)

References (11)
  • 6
    • 0038106802 scopus 로고
    • High thermal conductive aluminum nitride (AlN) substrates
    • (Japan Fine Ceramics Association)
    • K. Shinozaki, N. Iwase and A. Tsuge, High thermal conductive aluminum nitride (AlN) substrates, FC Annual Report for Overseas Readers (Japan Fine Ceramics Association) (1986), pp. 16-22.
    • (1986) FC Annual Report for Overseas Readers , pp. 16-22
    • Shinozaki, K.1    Iwase, N.2    Tsuge, A.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.