Imperfection-sensitive ductility of aluminium thin films

Scripta Materialia

Volumn 62, Issue 10, 2010, Pages 742-745

  Coulombier, M ^a   Boe A ^a,b   Brugger, C ^a   Raskin, J P ^a   Pardoen, T ^a  

^a UNIVERSITÉ CATHOLIQUE DE LOUVAIN   (Belgium)

^b UNIV LILLE   (France)

Author keywords

Aluminium; Ductility; Strain hardening; Thin films

Indexed keywords

AL FILMS; ALUMINIUM; AVERAGE STRAIN; IMPERFECTION SENSITIVITY; INTERNAL STRESS; MICROTENSILE TESTING; ON CHIPS; THICKNESS EFFECT;

ALUMINUM; PLASTICITY; STRAIN HARDENING; THICK FILMS; THIN FILMS;

DUCTILITY;

EID: 77649269837     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2010.01.048     Document Type: Article

References (23)

1. Lacour S., Wagner S., Huang Z., and Suo Z. Appl. Phys. Lett. 82 (2003) 2404
2. Sun Y., and Rogers J.A. Adv. Mater. 19 (2007) 1897
3. Béfahy S., Yunus S., Troosters M., Pardoen T., and Bertrand P. Appl. Phys. Lett. 91 (2007) 141911
4. Evans A.G., and Hutchinson J.W. Acta Mater. 43 (1995) 2507
5. Spearing S.M. Acta Mater. 48 (2000) 179
6. Iker F., Andre N., Pardoen T., and Raskin J.-P. J. Microelectromech. Syst. 15 (2006) 1687
7. Suo Z. Comprehensive Structural Integrity (2007), Elsevier, Amsterdam p. 265 (Chapter 8.08)
8. Espinosa H.D., Prorok B.C., and Peng B. J. Mech. Phys. Solids 52 (2004) 667
9. Tsuchiya T., Hirata M., Chiba N., Udo R., Yoshitomi Y., Ando T., Sato K., Takashima K., Higo Y., Saotome Y., Ogawa H., and Ozaki K. J. Microelectromech. Syst. 14 (2005) 903
10. Haque M.A., and Saif M.T.A. Acta Mater. 51 (2003) 3053
11. Meyers M.A., Mishra A., and Benson D.J. Prog. Mater. Science 51 (2006) 427
12. Hutchinson J.W., and Neale K.W. Acta Metall. 25 (1977) 839
13. Gianola D.S., Warner D.H., Molinari J.F., and Hemker K.J. Scripta Mater 55 (2006) 649
14. Legros M., Gianola D.S., and Hemker K.J. Acta Mater 56 (2008) 3380
15. Gravier S., Coulombier M., Safi A., André N., Boé A., Raskin J.P., and Pardoen T. J. Microelectromech. Syst. 18 (2009) 555
16. Guckel H., Burns D., Rutigliano C., Lovell E., and Choi B. J. Micromech. Microeng. 2 (1992) 86
17. Laconte J., Iker F., Jorez S., André N., Proost J., Pardoen T., Flandre D., and Raskin J.-P. Microelectron. Eng. 76 (2004) 219
18. Boé A., Safi A., Coulombier M., Pardoen T., and Raskin J.-P. Thin Solid Films 518 (2009) 260
19. Lawn B.R., and Wilshaw T.R. Fracture of Brittle Solids (1993), Cambridge University Press, Cambridge
20. Sinclair C.W., Poole W.J., and Bréchet Y. Scripta Mater 55 (2006) 739
21. Delincé M., Jacques P.J., Bréchet Y., Embury J.D., Geers M.G.D., and Pardoen T. Acta Mater 55 (2007) 2337
22. Niordson C.F., and Tvergaard V. Int. J. Solids Struct. 42 (2005) 2559
23. Geers M.G.D., Brekelmans W.A.M., and Janssen P.J.M. Int. J. of Solids Struct. 43 (2006) 7304