Metallic contacts to nitrogen and boron doped diamond-like carbon films

Thin Solid Films

Volumn 518, Issue 12, 2010, Pages 3332-3336

  Wang, F M ^a   Chen, M W ^a   Lai, Q B ^a  

^a XIAMEN UNIVERSITY   (China)

Author keywords

Boron; Diamond like carbon; Doping; Nitrogen; Ohmic contact; Schottky contact

Indexed keywords

AL CONTACT; BAND-STRUCTURE MODEL; BORON DOPED DIAMOND; BORON-DOPED; CONTACTING METALS; DIAMOND-LIKE CARBON; DIELECTRIC LAYER; DLC FILM; DOPING; ELECTRICAL PROPERTY; ELECTRICAL STUDIES; HYDROGENATED DIAMOND; IV CHARACTERISTICS; METALLIC CONTACTS; NONLINEAR I-V CHARACTERISTICS; RADIO FREQUENCY PLASMA; SCHOTTKY BARRIERS; SCHOTTKY CONTACTS;

ALUMINUM; BORON; BORON CARBIDE; CARBON FILMS; CONDUCTIVE FILMS; CURRENT VOLTAGE CHARACTERISTICS; DIAMONDS; DOPING (ADDITIVES); ELECTRIC CONTACTORS; ELECTRIC PROPERTIES; GOLD; METALS; NITROGEN; OHMIC CONTACTS; PLASMA DEPOSITION; PLATINUM; SCHOTTKY BARRIER DIODES; ZIRCONIUM;

DIAMOND LIKE CARBON FILMS;

EID: 77649225760     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.10.041     Document Type: Article

References (41)

1. Robertson J. Mater. Sci. Eng. R 37 (2002) 129
2. Grill A. Thin Solid Films 355-356 (1999) 189
3. Silva S.R.P., and Carey J.D. Diamond Relat. Mater. 12 (2003) 151
4. Milne W.I. Semicond. Sci. Technol. 18 (2003) S81
5. Godet C., and Kleider J.P. J. Mater. Sci. Mater. Electron. 17 (2006) 413
6. Lazar G., Zellama K., Clin M., and Godet C. Appl. Phys. Lett. 85 (2004) 6176
7. Sikora A., Berkesse A., Bourgeois O., Garden J.L., Guerret-Piécourt C., Rouzaud J.N., Loira A.S., Garrelie F., and Donnet C. Appl. Phys. A 94 (2009) 105
8. Zheng B., Zheng W.T., Zhang K., Wen Q.B., Zhu J.Q., Meng S.H., He X.D., and Han J.C. Carbon 44 (2006) 962
9. Robertson J. Semicond. Sci. Technol. 18 (2003) S12
10. Dtuiniewski M., Staryga E., and Bak G.W. IEEE Trans. Dielectr. Electr. Insul. 8 (2001) 418
11. Kleinsorge B., Ferrari A.C., Robertson J., and Milne W.I. J. Appl. Phys. 88 (2000) 1149
12. Moustafa S.H.M., Koos M., and Pocsik I. J. Non-Cryst. Solids 227-230 (1998) 1087
13. Foulani A. Appl. Surf. Sci. 206 (2003) 294
14. Ronning C., Griesmeier U., Gross M., Hofsgss H.C., Downing R.G., and Lamaze G.P. Diamond Relat. Mater. 4 (1995) 666
15. Paul S., and Clough F.J. Diamond Relat. Mater. 7 (1998) 1734
16. Zhang W.L., Xia Y.B., Ju J.H., Wang L.J., Fang Z.J., and Zhang M.L. Solid State Commun. 126 (2003) 163
17. Mott N.F., and Davis E.A. Electronic Processes in Non-Crystalline Materials. 2nd ed. (1979), Oxford University Press, Oxford
18. Mott N.F., and Twose W.D. Adv. Phys. 10 (1961) 107
19. Cremona M., Reyes R., Achete C.A., Tavora Britto R., and Camargo S.S. Thin Solid Films 447-448 (2004) 74
20. Chen B.J., Sun X.W., Divayana Y., and Tay B.K. J. Appl. Phys. 98 (2005) 046107
21. Meskinis S., Gudaitis R., Kopustinskas V., and Tamulevicius S. Appl. Surf. Sci. 254 (2008) 5252
22. Tibrewala A., Peiner E., Bandorf R., Biehl S., and Luthje H. Thin Solid Films 515 (2007) 8028
23. Foulani A., and Laurent C. Mater. Chem. Phys. 80 (2003) 466
24. Reyes R., Legnani C., Ribeiro Pinto P.M., Cremona M., de Araujo P.J.G., and Achete C.A. Appl. Phys. Lett. 82 (2003) 4017
25. Zeng A.P., Yin Y.B., Bilek M., and McKenzie D. Surf. Coat. Technol. 198 (2005) 202
26. Silva S.R.P., Carey J.D., Guo X., Tsang W.M., and Poa C.H.P. Thin Solid Films 482 (2005) 79
27. Liu E., Shi X., Cheah L.K., Hu Y.H., Tan H.S., Shi J.R., and Tay B.K. Solid State Electron. 43 (1999) 427
28. Cheng X., Zhang M.Y., Chen X.H., and Chen C. Solid State Electron. 51 (2007) 423
29. Clough F.J., Kleinsorge B., Milne W.I., Robertson J., Amaratunga G.A.J., and Roy B.N. Electron. Lett. 32 (1996) 498
30. Maeng S.L., Uchikoga S., Clough F.J., Tagliaferro A., Flewitt A.J., Robertson J., and Milne W.I. Diamond Relat. Mater. 9 (2000) 805
31. Hayashi Y., Kamada N., Soga T., and Jimbo T. Diamond Relat. Mater. 15 (2006) 1015
32. Krishna K.M., Umeno M., Nukaya Y., Soga T., and Jimbo T. Appl. Phys. Lett. 77 (2000) 1472
33. Rusop M., Soga T., and Jimbo T. Sol. Energy Mater. Sol. Cells 90 (2006) 3214
34. Soga T. Int. J. Mod. Phys. B 14 (2000) 206
35. Chen C.W., and Robertson J. J. Non-Cryst. Solids 227 (1998) 602
36. Casiraghi C., Ferrari A.C., and Robertson J. Phys. Rev. B 72 (2005) 085401
37. Mycielski W., Staryga E., Lipinski A., Mitura S., and Sokolowska A. Diamond Relat. Mater. 3 (1994) 858
38. Silva S.R.P., Clay K.J., Speakman S.P., and Amaratunga G.A.J. Diamond Relat. Mater. 4 (1995) 977
39. Staryga E., Bak G.W., and Dluzniewski M. Vacuum 74 (2004) 325
40. Modine F.A., Foegelle M.D., Finch C.B., and Allison C.Y. Phys. Rev. B 40 (1989) 9558
41. Gerbi J.E., Auciello O., Birrell J., Gruen D.M., Alphenaar B.W., and Carlisle J.A. Appl. Phys. Lett. 83 (2003) 2001