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Volumn 204, Issue 15, 2010, Pages 2368-2375
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Microstructure and wear resistance of double-layer TiN/PSZ coatings from alkoxide solutions by H2O-containing thermal plasma CVD
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Author keywords
Alkoxide solution; Double layer coating; Microstructure; Thermal plasma chemical vapor deposition; TiN PSZ; Water oxidation; Wear resistance
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Indexed keywords
ALKOXIDE SOLUTIONS;
COATING MICROSTRUCTURES;
DOUBLE LAYERS;
THERMAL PLASMA CHEMICAL VAPOR DEPOSITION;
THERMAL PLASMA CHEMICAL VAPOR DEPOSITIONS;
WATER OXIDATION;
CHEMICAL VAPOR DEPOSITION;
GLOW DISCHARGES;
LIGHT TRANSMISSION;
MACHINE TOOLS;
METAL WORKING TOOLS;
MICROSTRUCTURE;
OPTICAL EMISSION SPECTROSCOPY;
OXIDATION;
PLASMA DEPOSITION;
PLASMAS;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON WAFERS;
TAPE COATINGS;
TITANIUM NITRIDE;
TRANSMISSION ELECTRON MICROSCOPY;
TUNGSTEN ALLOYS;
TUNGSTEN CARBIDE;
WATER VAPOR;
WEAR RESISTANCE;
ZIRCONIUM;
CUTTING TOOLS;
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EID: 77649184435
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2010.01.007 Document Type: Article |
Times cited : (5)
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References (27)
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