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Volumn 37, Issue 6, 1998, Pages 1785-1789

Interferometric straightness measurement system using triangular prisms

Author keywords

Interferometer; Straightness measurement; Triangular prisms

Indexed keywords


EID: 0000739793     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601696     Document Type: Article
Times cited : (18)

References (9)
  • 1
    • 84865893254 scopus 로고    scopus 로고
    • "Interferometer system for measuring straightness and roll," U.S. Palent No. 3,790,284 (Feb. 1974)
    • R. R. Baldwin, "Interferometer system for measuring straightness and roll," U.S. Palent No. 3,790,284 (Feb. 1974).
    • Baldwin, R.R.1
  • 3
    • 0001311459 scopus 로고
    • Interferometric Straightness measurement system using a holographic grating
    • M. Yamauchi and K. Matsuda, "Interferometric Straightness measurement system using a holographic grating," Opt. Eng. 33(4), 1078-1083 (1994).
    • (1994) Opt. Eng. , vol.33 , Issue.4 , pp. 1078-1083
    • Yamauchi, M.1    Matsuda, K.2
  • 4
    • 1542689989 scopus 로고
    • Hologram interferometer to calibrate and measure the Straightness in micropositioning equipment
    • M. Celaya, I. Rizo, and E. Mercado, "Hologram interferometer to calibrate and measure the Straightness in micropositioning equipment," Proc. SPIE 1036, 44-51 (1989).
    • (1989) Proc. SPIE , vol.1036 , pp. 44-51
    • Celaya, M.1    Rizo, I.2    Mercado, E.3
  • 5
    • 84865895700 scopus 로고    scopus 로고
    • "Holographic straightness meter," U.S. Patent no. 4,466,693 (Aug. 1984)
    • K. Matsuda, K. Tenjinbayashi, and T. Kohno. "Holographic straightness meter," U.S. Patent no. 4,466,693 (Aug. 1984).
    • Matsuda, K.1    Tenjinbayashi, K.2    Kohno, T.3
  • 6
    • 0023162970 scopus 로고
    • Straightness measurement using a heterodyne moire method
    • H. H. Sakuma and H. Wada, "Straightness measurement using a heterodyne moire method," Prec. Eng. 9(1), 19-22 (1987).
    • (1987) Prec. Eng. , vol.9 , Issue.1 , pp. 19-22
    • Sakuma, H.H.1    Wada, H.2
  • 7
    • 0001101061 scopus 로고
    • Two-dimensional automatic Straightness measurement system based on optical activity
    • C. Yin, W. Chen, Z. Fang, and J. Liang, "Two-dimensional automatic Straightness measurement system based on optical activity," Opt. Eng. 30(4), 480-482 (1991).
    • (1991) Opt. Eng. , vol.30 , Issue.4 , pp. 480-482
    • Yin, C.1    Chen, W.2    Fang, Z.3    Liang, J.4
  • 8
    • 84865893253 scopus 로고    scopus 로고
    • "Straightness of travel interferometer," U.S. Patent no. 4,787,747 (Nov. 1988)
    • G. E. Sommargren and P. S. Young, "Straightness of travel interferometer," U.S. Patent no. 4,787,747 (Nov. 1988).
    • Sommargren, G.E.1    Young, P.S.2
  • 9
    • 1542480621 scopus 로고
    • catalog, Renishaw, Gloucestershire, United Kingdom
    • Laser calibration system, catalog, Renishaw, Gloucestershire, United Kingdom (1991).
    • (1991) Laser Calibration System


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.