Ultra smooth NiO thin films on flexible plastic (PET) substrate at room temperature by RF magnetron sputtering and effect of oxygen partial pressure on their properties

Applied Surface Science

Volumn 256, Issue 10, 2010, Pages 3142-3147

  Nandy, S ^a   Goswami, S ^a   Chattopadhyay, K K ^a  

^a JADAVPUR UNIVERSITY   (India)

Author keywords

HRTEM; NiO; PET; RF sputtering; Transparent conducting oxide

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALLINE MATERIALS; GLASS; MAGNETRON SPUTTERING; NANOCRYSTALS; NICKEL OXIDE; OXYGEN; PARTIAL PRESSURE; PLASTIC BOTTLES; POLYETHYLENE TEREPHTHALATES; SUBSTRATES; SURFACE ROUGHNESS; TRANSPARENT CONDUCTING OXIDES;

HRTEM; NICKEL OXIDE THIN FILMS; OXYGEN PARTIAL PRESSURE; POLYETHYLENE TEREPHTHALATES (PET); RF MAGNETRON SPUTTERING TECHNIQUE; RF-MAGNETRON SPUTTERING; RF-SPUTTERING; TRANSMISSION ELECTRON;

THIN FILMS;

EID: 77349123511     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.11.088     Document Type: Article

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