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Volumn 47, Issue 1-4, 2010, Pages 147-152

A soft moulding process for manufacture of net-shape ceramic microcomponents

Author keywords

Al 2O3 SiC; Alumina; Microcomponents; Soft lithography; Soft moulding; SU 8

Indexed keywords

AQUEOUS SUSPENSIONS; CERAMIC SLURRY; DEMOULDING; FINE FEATURE; GREEN COMPONENT; MICRO-COMPONENTS; MICROCOMPONENT; MICRON SCALE; MOULD FILLING; MOULDING PROCESS; NET-SHAPE; NON-AQUEOUS; POLYDIMETHYSILOXANE; SOFT LITHOGRAPHY;

EID: 77249098872     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-008-1864-z     Document Type: Article
Times cited : (22)

References (14)
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    • M Heule LJ Gauckler 2001 Adv Mater 13 1790 10.1002/1521-4095(200112)13: 23<1790::AID-ADMA1790>3.0.CO;2-C (Pubitemid 33143202)
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    • Heule, M.1    Gauckler, L.J.2
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    • 34249063628 scopus 로고    scopus 로고
    • A net-shape fabrication process of alumina micro-components using a soft lithography technique
    • DOI 10.1088/0960-1317/17/2/002, PII S0960131707321335, 002
    • ZG Zhu XY Wei K Jiang 2007 J Micromech Microeng 17 193 10.1088/0960-1317/17/2/002 (Pubitemid 46778483)
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    • Preparation of concentrated aqueous alumina suspensions for soft-molding microfabrication
    • DOI 10.1016/S0955-2219(03)00241-3
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    • Zhang, D.1    Su, B.2    Button, T.W.3
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    • Sidewall roughness characterization and comparison between silicon and SU-8 microcomponents
    • DOI 10.1016/j.matchar.2006.07.005, PII S1044580306002270
    • CH Lee K Jiang GJ Davies 2007 Mater Charact 58 603 10.1016/j.matchar. 2006.07.005 (Pubitemid 46702696)
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    • Lee, C.H.1    Jiang, K.2    Davies, G.J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.