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Volumn 47, Issue 1-4, 2010, Pages 147-152
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A soft moulding process for manufacture of net-shape ceramic microcomponents
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Author keywords
Al 2O3 SiC; Alumina; Microcomponents; Soft lithography; Soft moulding; SU 8
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Indexed keywords
AQUEOUS SUSPENSIONS;
CERAMIC SLURRY;
DEMOULDING;
FINE FEATURE;
GREEN COMPONENT;
MICRO-COMPONENTS;
MICROCOMPONENT;
MICRON SCALE;
MOULD FILLING;
MOULDING PROCESS;
NET-SHAPE;
NON-AQUEOUS;
POLYDIMETHYSILOXANE;
SOFT LITHOGRAPHY;
ALUMINUM;
CERAMIC MATERIALS;
LITHOGRAPHY;
MICROCHANNELS;
MOLDING;
MOLDS;
SILICON CARBIDE;
SILICONES;
SUSPENSIONS (FLUIDS);
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EID: 77249098872
PISSN: 02683768
EISSN: 14333015
Source Type: Journal
DOI: 10.1007/s00170-008-1864-z Document Type: Article |
Times cited : (22)
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References (14)
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