Sidewall roughness characterization and comparison between silicon and SU-8 microcomponents

Materials Characterization

Volumn 58, Issue 7, 2007, Pages 603-609

  Lee, C H ^a   Jiang, K ^a   Davies, G J ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

DRIE; SU 8 fabrication; Surface roughness; UTSP

Indexed keywords

ATOMIC FORCE MICROSCOPY; CAPILLARITY; FRICTION; INDUCTIVELY COUPLED PLASMA; SURFACE ROUGHNESS; SURFACE TENSION;

MICROCOMPONENTS; MICRODEVICES; MICROGEAR TRANSMISSION; TRANSMISSION EFFICIENCY;

MICROFLUIDICS;

EID: 34247859193     PISSN: 10445803     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchar.2006.07.005     Document Type: Article

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