Fabrication and characterization of coaxial scanning near-field optical microscopy cantilever sensors

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1540-1542

  Salomo, M ^a   Bayer, D ^a   Schaaf, B R ^a   Aeschlimann, M ^a   Oesterschulze, E ^a  

^a University of Koblenz Landau   (Germany)

Author keywords

Antenna structures; Atomic force microscopy; Combined probes; Scanning near field optical microscopy

Indexed keywords

ANTENNA STRUCTURES; CANTILEVER SENSORS; FOCUSED ION BEAM MILLING; FORCE MICROSCOPY; MODEL SYSTEM; NEAR-FIELD; PROCESS SCHEMES; SCANNING NEAR-FIELD OPTICAL MICROSCOPY;

ANTENNAS; ATOMIC FORCE MICROSCOPY; NANOCANTILEVERS; OPTICAL DATA STORAGE; OPTICAL INSTRUMENTS; PROBES; SCANNING; SENSORS;

NEAR FIELD SCANNING OPTICAL MICROSCOPY;

EID: 76949107891     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.11.031     Document Type: Article

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