Effects of Al buffer layer on growth of highly vertically aligned carbon nanotube forests for in situ yarning

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1500-1505

  Choi, Bum Ho ^a   Yoo, Hana ^a   Kim, Young Baek ^a   Lee, Jong Ho ^a  

^a Korea Institute of Industrial Technology   (South Korea)

Author keywords

Al buffer layer; Carbon nanotubes; CVD; Vertically aligned growth; Yarning

Indexed keywords

AL BUFFER LAYER; CATALYTIC LAYERS; CNT FIBERS; CVD; GROWTH TIME; IN-SITU; REINFORCED MATERIAL; SI SUBSTRATES; SUBSTRATE CONDITIONS; VERTICALLY ALIGNED; VERTICALLY ALIGNED CARBON NANOTUBE;

ALUMINUM; ALUMINUM COATINGS; BUFFER LAYERS; CHEMICAL VAPOR DEPOSITION; REINFORCED PLASTICS; SPINNING (FIBERS); SUBSTRATES; SYNTHESIS (CHEMICAL);

CARBON NANOTUBES;

EID: 76949086573     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.11.067     Document Type: Article

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