Vertically aligned growth of carbon nanotubes with long length and high density

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 4, 2005, Pages 1450-1453

  Lee, Kuei Yi ^a   Honda, Shin Ichi ^a   Katayama, Mitsuhiro ^a   Miyake, Takashi ^a   Himuro, Katsuya ^a   Oura, Kenjiro ^a   Lee, Jung Goo ^a   Mori, Hirotaro ^a   Hirao, Takashi ^b  

^a OSAKA UNIVERSITY   (Japan)

^b KOCHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CHEMICAL VAPOR DEPOSITION; OXYGEN; SILICON; SYNTHESIS (CHEMICAL);

BUFFER LAYERS; CATALYST FILMS; TIME DEPENDENCIES;

CARBON NANOTUBES;

EID: 31144470564     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1941187     Document Type: Article

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