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Volumn 10, Issue 3, 2009, Pages 167-170

Vibration reduction control of a voice coil motor (VCM) nano scanner

Author keywords

3D shape morphing; Implicit function; Mesh smoothing; Modified laplacian coordinate; Template mesh

Indexed keywords


EID: 76849116198     PISSN: 12298557     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12541-009-0063-7     Document Type: Article
Times cited : (21)

References (15)
  • 1
    • 11744339064 scopus 로고    scopus 로고
    • Electron beam and scanning probe lithography: A comparision
    • Wildeer, K., Quate, C. F., Singh, B. and Kyser, D. F., "Electron beam and scanning probe lithography: a comparision," J. Vac. Sci. Technol. B, Vol. 16, No. 6, pp. 3864-3873, 1998.
    • (1998) J. Vac. Sci. Technol. B , vol.16 , Issue.6 , pp. 3864-3873
    • Wildeer, K.1    Quate, C.F.2    Singh, B.3    Kyser, D.F.4
  • 5
    • 77349125506 scopus 로고    scopus 로고
    • A study of the design and conrol system for the ultra-precision stage
    • Park, J. S. and Jeong, K. W., "A study of the design and conrol system for the ultra-precision stage," Proceedings of the KSMTE Spring Conference, pp. 54-59, 2005.
    • (2005) Proceedings of The KSMTE Spring Conference , pp. 54-59
    • Park, J.S.1    Jeong, K.W.2
  • 6
    • 0026260983 scopus 로고
    • A dual-stage magnetic disk drive actuator using a piezoelectric device for a high track density
    • Mori, K., Munemoto, T., Otsuki, H., Yamaguchi, Y. and Akagi, K., "A dual-stage magnetic disk drive actuator using a piezoelectric device for a high track density," IEEE Trans. On Magnetics, Vol. 27, No. 6, pp. 5298-5300, 1991
    • (1991) IEEE Trans. On Magnetics , vol.27 , Issue.6 , pp. 5298-5300
    • Mori, K.1    Munemoto, T.2    Otsuki, H.3    Yamaguchi, Y.4    Akagi, K.5
  • 8
    • 0000880017 scopus 로고    scopus 로고
    • Creep characteristics of PZT stack actuator
    • Jung, H. W. and Gweon, D.-G., "Creep characteristics of PZT stack actuator," Review of Scientific Instruments, Vol. 71. No. 4, pp. 1896-1900, 2000
    • (2000) Review of Scientific Instruments , vol.71 , Issue.4 , pp. 1896-1900
    • Jung, H.W.1    Gweon, D.-G.2
  • 9
    • 0142250165 scopus 로고    scopus 로고
    • Precision Position Control of a Piezoelectric Actuator Using Neural network
    • Kim, H.-S., Lee, B.-R. and Park, K.-Y., "Precision Position Control of a Piezoelectric Actuator Using Neural network," J. of KSPE, Vol. 16, No. 11, pp. 9-15, 1999.
    • (1999) J. of KSPE , vol.16 , Issue.11 , pp. 9-15
    • Kim, H.-S.1    Lee, B.-R.2    Park, K.-Y.3
  • 10
    • 76849111655 scopus 로고    scopus 로고
    • Ultra-Precision Control of Piezoelectric Actuator System Using Hysteresis Compensation
    • Hong, S. R. and Lee, B. R., "Ultra-Precision Control of Piezoelectric Actuator System Using Hysteresis Compensation," Proceeding of the KSPE Autumn Conference, pp. 85-88, 2000
    • (2000) Proceeding of The KSPE Autumn Conference , pp. 85-88
    • Hong, S.R.1    Lee, B.R.2
  • 13
    • 76849089299 scopus 로고    scopus 로고
    • Development of small loading and Positioning Device using VCM
    • Kwon, K. H., Oh, S. H., Cho, N. G. and Yoon, J. Y., "Development of small loading and Positioning Device using VCM," J. of KSPE, Vol. 20, No. 12, pp. 64-72, 2003.
    • (2003) J. of KSPE , vol.20 , Issue.12 , pp. 64-72
    • Kwon, K.H.1    Oh, S.H.2    Cho, N.G.3    Yoon, J.Y.4
  • 15
    • 27644556087 scopus 로고    scopus 로고
    • Optimal design and control of a voice coil motor driven flexure hinge for AFM actuator
    • Youm, W. S., Lee, S.-Q. and Park, K. H., "Optimal design and control of a voice coil motor driven flexure hinge for AFM actuator," Proc. of AIM, pp. 325-328, 2005
    • (2005) Proc. of AIM , pp. 325-328
    • Youm, W.S.1    Lee, S.-Q.2    Park, K.H.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.