Optimal design and control of a voice coil motor driven flexure hinge for AFM actuator

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

Volumn 1, Issue , 2005, Pages 325-328

  Youm, WooSub ^a   Lee, Sung Q ^b   Park, Kyihwan ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; BENDING STRENGTH; COIN OPERATED EQUIPMENT; MATHEMATICAL MODELS; NATURAL FREQUENCIES;

FLEXURE HINGE; OPTIMAL DESIGN; PRECISION ACTUATION; VOICE COIL MOTORS (VCM);

HINGES;

EID: 27644556087     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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4. Sung-Q Lee, Eun-Kyung Kim, Woo-Sub Youm, Kyi-Hwan Park, and Kang-Ho Park, "Bi-direction controllable AFM head driven by VCM with flexure hinge", Proc. of 4th euspen, 2004
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