Development of 3-axis nano stage for precision positioning in lithography system

IEEE International Conference on Mechatronics and Automation, ICMA 2005

Volumn , Issue , 2005, Pages 1598-1603

  Lee, Dong Ju ^a   Lee, Kang Nyung ^a   Park, No Cheol ^a   Park, Young Pil ^a   Kim, Hyuk ^b   Lee, Suk Won ^b   Choi, Hyoung Gil ^b   Lee, Moon Gu ^b   Uh, Jiho ^b   Park, Jung Woo ^b   Choi, Yong Hwan ^b   Lee, Dong Jin ^b  

^a Yonsei University   (South Korea)

^b SAMSUNG Electronics   (South Korea)

Author keywords

3 axis nano stage; Design of experiments; Dynamic characteristics; Flexible mode; Lithography; Magnetic circuit

Indexed keywords

KINEMATICS; LITHOGRAPHY; MAGNETIC CIRCUITS;

DESIGN OF EXPERIMENTS; DYNAMIC CHARACTERISTICS; FLEXIBLE MODE;

MECHATRONICS;

EID: 27744449417     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Sung-Q Lee and Dae-Gab Gweon, "A new 3-DOF z-tilts micropositioning system using electromagnetic actuators and air bearings", Precision Engineering, 24, pp. 24-31, 2000.
2. Dong Min Kim, Ki Hyun Kim, Sung Q Lee and Dae Gab Gweon, "Optimal Design and Control of xy9 Fine Stage in Lithography System", Journal of the Korean Society of Precision Engineering, vol.19, no. 12, pp. 163-170, December 2002.
3. K. S. Chen, D. L. Trumper and S. T. Smith, "Design and control for an electromagnetically driven X-Y-θ stage", Int. JSPE, vol. 26, issue 4, pp. 355-369, October 2002.
4. Yung-Tien Liu, Rong-Fong Fung and Tai-Kun Huang, "Dynamic responses of a precision positioning table impacted by a soft-mounted piezoelectric actuator", Int. JSPE, vol. 28, issue 3, pp. 252-260, July 2004.
5. Motoya Taniguchi, Minoru Ikeda, Akira Inagaki and Ryuichi Funatsu, "Ultra precision wafer positioning by six-axis micro-motion mechanism", Int. JSPE, vol.26, no.1, pp. 35-40, 1992.
6. Dong-Ju Lee, Ki-Suk Woo, No-Cheol Park and Young-Pil Park, "Design and Optimization of a Linear Actuator for Subminiature Optical Storage Devices", IEEE Transactions on Magnetics, vol. 41, no. 2, pp. 1055-1057, February 2005.