Atmospheric-pressure plasmas for solar cell manufacturing

Contributions to Plasma Physics

Volumn 49, Issue 9, 2009, Pages 662-670

  Dani, I ^a   Mader G ^a   Grabau, P ^a   Dresler, B ^a   Linaschke, D ^a   Lopez, E ^a   Kaskel, S ^a   Beyer, E ^a  

^a FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

Atmospheric pressure

Indexed keywords

ATMOSPHERIC CHEMISTRY; ELECTRIC DISCHARGES; PLASMA DIAGNOSTICS; SILICON SOLAR CELLS; THROUGHPUT;

ATMOSPHERIC PRESSURE PLASMAS; CONTINUOUS PROCESSING; CRYSTALLINE SILICON SOLAR CELLS; HIGH-THROUGHPUT; INNOVATIVE PLASMA TECHNOLOGIES; LOW PROCESSING TEMPERATURE; LOW-COSTS; PROCESSING CAPABILITY; PRODUCTION LINE; SOLAR CELL MANUFACTURING;

ATMOSPHERIC PRESSURE;

EID: 76849099489     PISSN: 08631042     EISSN: 15213986     Source Type: Journal    
DOI: 10.1002/ctpp.200910071     Document Type: Article

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