Requirements of PECVD SiNx:H layers for bulk passivation of mc-Si

Solar Energy Materials and Solar Cells

Volumn 90, Issue 18-19, 2006, Pages 3244-3250

  Dekkers, H F W ^a   De Wolf, S ^a   Agostinelli, G ^a   Duerinckx, F ^a   Beaucarne, G ^a  

^a IMEC   (Belgium)

Author keywords

Multi crystalline; Passivation; Silicon nitride

Indexed keywords

DIFFUSION; HYDROGENATION; PASSIVATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON SOLAR CELLS; SOLAR ENERGY;

HIGH FREQUENCY (HF) PLASMAS; MULTI-CRYSTALLINE; SILICON LAYER;

SILICON NITRIDE;

EID: 33748306067     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2006.06.024     Document Type: Article

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