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Volumn 315, Issue , 2010, Pages 131-138

Modelling the interaction forces between an ideal measurement surface and the stylus tip of a novel vibrating micro-scale CMM probe

Author keywords

Micro CMM probe; Surface interaction forces

Indexed keywords

ANALYTICAL MODEL; INTERACTION FORCES; MICRO-SCALES; NANO SCALE; PROBE SURFACE; SURFACE FORCES; SURFACE INTERACTIONS; THREE AXES; THREE-AXIS; VIBRATION AMPLITUDE; VIBRATION EXPERIMENT;

EID: 76749146987     PISSN: 18684238     EISSN: None     Source Type: Book Series    
DOI: 10.1007/978-3-642-11598-1_15     Document Type: Article
Times cited : (14)

References (13)
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    • A fully traceable miniature CMM with sub-micrometre uncertainty
    • Lewis, A.J.: A fully traceable miniature CMM with sub-micrometre uncertainty. In: Proc. SPIE, vol.5190, pp. 265-276 (2003)
    • (2003) Proc. SPIE , vol.5190 , pp. 265-276
    • Lewis, A.J.1
  • 5
    • 84884920461 scopus 로고    scopus 로고
    • Investigating scaling limits of a fibre based resonant probe for metrology applications
    • Portland, USA, October 19-24
    • Seugling, R.M., Darnell, I.M., Florando, J.N., Woody, S.C., Bauza, M., Smith, S.T.: Investigating scaling limits of a fibre based resonant probe for metrology applications. In: Proc. 12th ICPE, Portland, USA, October 19-24 (2008)
    • (2008) Proc. 12th ICPE
    • Seugling, R.M.1    Darnell, I.M.2    Florando, J.N.3    Woody, S.C.4    Bauza, M.5    Smith, S.T.6
  • 10
    • 0029754596 scopus 로고    scopus 로고
    • Adhesion forces reduction for micro manipulation based on microphysics
    • San Diego, Febryary 11-15
    • Arai, F., Andou, D., Fukuda, T.: Adhesion forces reduction for micro manipulation based on microphysics. In: Proc. IEEE 9th Annual International Workshop on MEMS, San Diego, Febryary 11-15, pp. 354-359 (1996)
    • (1996) Proc. IEEE 9th Annual International Workshop on MEMS , pp. 354-359
    • Arai, F.1    Andou, D.2    Fukuda, T.3
  • 11
    • 6244231783 scopus 로고    scopus 로고
    • Demonstration of the Casimir force in the 0.6 to 6 m range
    • Lamoreaux, S.K.: Demonstration of the Casimir force in the 0.6 to 6 m range. Phys. Rev. Lett. 78(1), 5-8 (1997)
    • (1997) Phys. Rev. Lett. , vol.78 , Issue.1 , pp. 5-8
    • Lamoreaux, S.K.1
  • 12
    • 6344285716 scopus 로고    scopus 로고
    • Compact models for squeeze-film damping in the slip flow regime
    • Sattler, R., Wachutka, G.: Compact models for squeeze-film damping in the slip flow regime. NSTI-Nanotech. 2, 243-246 (2004)
    • (2004) NSTI-Nanotech. , vol.2 , pp. 243-246
    • Sattler, R.1    Wachutka, G.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.