A fully traceable miniature CMM with sub-micrometre uncertainty

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5190, Issue , 2003, Pages 265-276

  Lewis, Andrew J ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; DATA REDUCTION; HETERODYNING; INTERFEROMETERS; LASER BEAMS; MEASUREMENT THEORY; MIRRORS; OPTICAL DESIGN; PROBES; SENSORS; THERMAL EFFECTS;

MESO SCALE METROLOGY; MICRO SYSTEM TECHNOLOGY (MST); NANOMETERS; NANOMETROLOGY;

COORDINATE MEASURING MACHINES;

EID: 2342479152     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.503349     Document Type: Conference Paper

References (9)

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