Comparison of pilot and industrial scale atmospheric pressure glow discharge systems including a novel electro-acoustic technique for process monitoring

Plasma Sources Science and Technology

Volumn 19, Issue 1, 2010, Pages

  Tynan, J ^a   Law, V J ^b   Ward, P ^c   Hynes, A M ^a   Cullen, J ^c   Byrne, G ^a   Daniels, S ^b   Dowling, D P ^a  

^a UNIVERSITY COLLEGE DUBLIN   (Ireland)

^b DUBLIN CITY UNIVERSITY   (Ireland)

^c Holfeld Plastics   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS POLYETHYLENES; ATMOSPHERIC PRESSURE GLOW DISCHARGE; DIAGNOSTIC TOOLS; ELECTRO-ACOUSTIC; EMISSION INTENSITY; HOMOGENEOUS PLASMA; INDUSTRIAL SCALE; INDUSTRIAL SCALE SYSTEMS; INDUSTRIAL SYSTEMS; MULTI VARIATE ANALYSIS; PILOT SYSTEM; PLASMA POWER; PLASMA SYSTEMS; POLYMER PROCESSING; POWER CYCLE; RUN TO RUN; SCALE-UP; TEMPORALLY RESOLVED; TEREPHTHALATE; VISUAL ANALYSIS;

ACOUSTIC SPECTROSCOPY; ACOUSTICS; ATMOSPHERIC PRESSURE; DIAGNOSTIC PRODUCTS; EMISSION SPECTROSCOPY; GLOW DISCHARGES; HELIUM; INDUSTRIAL EMISSIONS; OPTICAL EMISSION SPECTROSCOPY; OXYGEN; PLASMA DEVICES; PLASMA THEORY; POLYETHYLENE TEREPHTHALATES; PROCESS MONITORING; THERMOPLASTICS;

PLASMA STABILITY;

EID: 76649138349     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/19/1/015015     Document Type: Article

References (34)

1. Twomey B, Rahman M, Byrne G, Hynes A M, O'Hare L A, O'Neill L and Dowling D 2008 Effect of plasma exposure on the chemistry and morphology of aerosol-assisted, plasma-deposited coatings Plasma Process. Polym. 5 737-44
2. Wagner H E, Brandenburg R, Kozlov K V, Sonnenfeld A, Michel P and Behnke J F 2003 The barrier discharge: basic properties and applications to surface treatment Vacuum 71 417-36
3. Liu C, Cui N, Brown N M D and Meenan B J 2004 Effects of DBD plasma operating parameters on the polymer surface modification Surf. Coat. Technol. 185 311-20
4. Tendero C, Tixier C, Tristant P, Desmaison J and Leprince P 2006 Atmospheric pressure plasmas: a review Spectrochim. Acta Part B: At. Spectrosc. 61 2-30
5. Quast M, Mayr P and Stock H-R 1999 Plasma monitoring of plasma-assisted nitriding of aluminium alloys Surf. Coat. Technol. 120-121 244-9
6. Lynch J B, Spence P D, Baker D E and Postlethwaite T A 1999 Atmospheric pressure plasma treatment of polyethylene via a pulse dielectric barrier discharge: comparison using various gas compositions versus corona discharge in air J. Appl. Polym. Sci. 71 319-31
7. Kunhardt E E 2000 Generation of large-volume, atmospheric-pressure, nonequilibriumplasmas IEEE Trans. Plasma Sci. 28 189-200
8. Thornhill N F, Melbo H and Wiik J 2006 Multidimensional visualization and clustering of historical process data Indust. Eng. Chem. Res. 45 5971-85
9. Law V J and Macgearailt N 2007 Visualization of a dual-frequency plasma etch process Meas. Sci. Technol. 18 645-9
10. Ramamoorthy A, Rahman M, Mooney D A, Don MacElroy J M and Dowling D P 2008 Thermal stability studies of atmospheric plasma deposited siloxane films deposited on Vycor™ glass Surf. Coat. Technol. 202 4130-6
11. Tynan J, Dowling D P, Byrne G and Hughes D 2007 Enhancing polymer adhesion through surface activation using an in-line atmospheric pressure plasma Int. J. Nanomanuf. 1 554-69
12. Tynan J, Law V J, Twomey B, Hynes A M, Daniels S, Byrne G and Dowling D P 2009 Evaluation of real-time non-invasive performance analysis tools for the monitoring of atmospheric pressure plasma Meas. Sci. Technol. 20 115703
13. Massines F, Gherardi N, Naude N and Segur P 2005 Glow and Townsend dielectric barrier discharge in various atmosphere Plasma Phys. Control. Fusion 47 B577-B88
14. Ellingboe A R, Law V J, Soberon F, Garcia F and Graham W 2005 External circuit system effects on chlorine plasma instabilities Electron. Lett. 41 525-6
15. Law V J 2008 Process-induced oscillator frequency pulling and phase noise within plasma systems Vacuum 82 630-8
16. Radu I, Bartnikas R, Czeremuszkin G and Wertheimer M R 2003 Diagnostics of dielectric barrier discharges in noble gases: atmospheric pressure glow and pseudoglow discharges and spatio-temporal patterns IEEE Trans. Plasma Sci. 31 411-21
17. Duda R O, Hart P E and Stock D G 2001 Pattern Classification (New York: Wiley)
18. Gottscho R A and Donnelly V M 1984 Optical emission actinometry and spectral line shapes in rf glow discharges J. Appl. Phys. 56 245-50
19. Massines F, Segur P, Gherardi N, Khamphan C and Ricard A 2003 Physics and chemistry in a glow dielectric barrier discharge at atmospheric pressure: diagnostics and modelling Surf. Coat. Technol. 174 8-14
20. Arkhipenko V I, Kirillov A A, Simonchik L V and Zgirouski S M 2005 Influence of the nitrogen helium mixture ratio on parameters of a self-sustained normal dc atmospheric pressure glow discharge Plasma Sources Sci. Technol. 14 757-65
21. Nersisyan G and Graham W G 2004 Characterization of a dielectric barrier discharge operating in an open reactor with flowing helium Plasma Sources Sci. Technol. 13 582-7
22. 2 microwave discharge at atmospheric pressure: behaviour of the time afterglow J. Phys. D: Appl. Phys. 39 4178-85
23. Fantz U 2006 Basics of plasma spectroscopy Plasma Sources Sci. Technol. 15 S137-S47
24. Fuller N C, Malyshev M V, Donnelly V M and Herman I P 2000 Characterization of transformer coupled oxygen plasmas by trace rare gases-optical emission spectroscopy and Langmuir probe analysis Plasma Sources Sci. Technol. 9 116-27
25. Srivastava A K, Garg M K, Prasad K S G, Kumar V, Chowdhuri M B and Prakash R 2007 Characterization of atmospheric pressure glow discharge in helium using Langmuir probe, emission spectroscopy, and discharge resistivity IEEE Trans. Plasma Sci. 35 1135-42
26. Lee D, Park J M, Hong S H and Kim Y 2005 Numerical simulation on mode transition of atmospheric dielectric barrier discharge in helium-oxygen mixture IEEE Trans. Plasma Sci. 33 949-57
27. Yu Q S and Yasuda H K 1998 An optical emission study on expanding low-temperature cascade arc plasmas Plasma Chem. Plasma Process. 18 461-85
28. Radu I, Bartnikas R and Wertheimer M R 2003 Frequency and voltage dependence of glow and pseudoglow discharges in helium under atmospheric pressure IEEE Trans. Plasma Sci. 31 1363-78
29. Roth J R, Rahel J, Dai X and Sherman D M 2005 The physics and phenomenology of One Atmosphere Uniform Glow Discharge Plasma(OAUGDP™) reactors for surface treatment applications J. Phys. D: Appl. Phys. 38 555-67 (Pubitemid 40297504)
30. 2 atmospheric pressure glow discharge and its dry etching properties of organic materials Surf. Coat. Technol. 146 474-9
31. Law V J, O'Connor N, Twomey B, Dowling D P and Daniels S 2009 Visualization of atmospheric pressure plasma electrical parameters Topics on Chaotic Systems: Selected Papers from Chaos 2008 International Conference ed C H Skiadas, I Dimotikalis and C Skiadas (Singapore: World Scientific)
32. Law V J 2007 Audio sampling of atmospheric pressure plasma via computer microphone jack as a method for monitoring plasma parameters British Patent Pending No 0808249.7
33. Koh A T C, Thornhill N F and Law V J 1999 Principal component analysis of plasma harmonics in end-point detection of photoresist stripping Electron. Lett. 35 1383-5
34. Kekez M M, Barrault M R and Craggs J D 1970 Spark channel formation J. Phys. D: Appl. Phys. 3 1886-96