Characteristics of He/O2 atmospheric pressure glow discharge and its dry etching properties of organic materials

Surface and Coatings Technology

Volumn 146-147, Issue , 2001, Pages 474-479

  Lee, Yong Hyuk ^a   Yi, Chang Heon ^a   Chung, Min Jae ^a   Yeom, Geun Young ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Capillary dielectrics; He O2 gas mixtures; Optical emission spectroscopy

Indexed keywords

DIELECTRIC MATERIALS; ELECTRIC DISCHARGES; ELECTRODES; EMISSION SPECTROSCOPY; IONIZATION; MICROELECTRONIC PROCESSING;

ELECTRON CONSUMPTIONS;

ETCHING;

DIELECTRIC PROPERTY; ETCHING; MEASUREMENT METHOD; ORGANIC COMPOUND;

EID: 0035465659     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01459-1     Document Type: Article

References (10)