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Volumn 204, Issue 12-13, 2010, Pages 1929-1932
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Aperiodic W/B4C multilayer systems for X-ray optics: Quantitative determination of layer thickness by HAADF-STEM and X-ray reflectivity
c
Incoatec GmbH
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(Germany)
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Author keywords
Aperiodic multilayer systems; Geometric phase analysis (GPA); High angle annular dark field scanning transmission electron microscopy (HAADF STEM); TEM; X ray optical elements; X ray reflectivity measurements
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Indexed keywords
GEOMETRIC PHASE ANALYSIS;
HAADF-STEM;
HIGH-ANGLE ANNULAR DARK FIELDS;
MULTI-LAYER SYSTEM;
SCANNING TRANSMISSION ELECTRON MICROSCOPY;
TEM;
X-RAY OPTICAL ELEMENTS;
X-RAY REFLECTIVITY MEASUREMENTS;
BANDWIDTH;
ELECTRIC FIELD MEASUREMENT;
FILM PREPARATION;
LIGHT TRANSMISSION;
MICROSTRUCTURE;
MULTILAYERS;
OPTICAL DEVICES;
OPTICAL MULTILAYERS;
REFLECTION;
SCANNING;
SCANNING ELECTRON MICROSCOPY;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY DIFFRACTION;
X RAYS;
X RAY ANALYSIS;
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EID: 76349099132
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2009.10.005 Document Type: Article |
Times cited : (2)
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References (11)
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