SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 518, Issue 10, 2010, Pages 2775-2778

Direct patterning of double-layered metal thin films by a pulsed Nd:YAG laser beam

(3) Yoo, Hyeonggeun a Shin, Hyunkwon a Lee, Myeongkyu a

a Yonsei University (South Korea)

Author keywords

Double layers; Metal thin film; Patterning; Pulsed laser

Indexed keywords

DIRECT-PATTERNING; DOUBLE LAYERS; ELASTIC FORCE; ELECTRICAL CONTACTS; ELECTRONIC DEVICE; GRAIN BOUNDARY REGIONS; METAL THIN FILM; METALLIC LAYERS; METALLIZATIONS; NANOSIZED GRAINS; ND-YAG LASERS; PATTERN FIDELITY; POLYCRYSTALLINE; PULSED LASER; PULSED ND:YAG LASER; SELECTIVE REMOVAL; SIMULATION RESULT; TECHNOLOGICAL SIGNIFICANCE;

ELASTICITY; GLASS LASERS; GOLD; GRAIN BOUNDARIES; LASER BEAMS; METAL RECOVERY; METALS; NEODYMIUM; PULSED LASER APPLICATIONS; PULSED LASERS; SILVER; THERMOELASTICITY; THIN FILM DEVICES; THIN FILMS;

NEODYMIUM LASERS;

EID: 76049098378 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2009.10.018 Document Type: Article

Times cited : (16)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.