Selective emitter solar cell formation by NH3 plasma nitridation and single diffusion

Semiconductor Science and Technology

Volumn 25, Issue 1, 2010, Pages

  Wu, Yung Hsien ^a   Chen, Lun Lun ^a   Wu, Jia Rong ^a   Wu, Min Lin ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPETITIVE ADVANTAGE; DEPTH PROFILE; ELECTRICAL CHARACTERIZATION; FULLY INTEGRATED; HEAVILY DOPED; MASS PRODUCTION; PLASMA NITRIDATION; SELECTIVE EMITTERS; SELECTIVE FORMATION; SHORT WAVELENGTHS; SI SURFACES; SINGLE DIFFUSION; SURFACE RECOMBINATIONS;

CELLULAR MANUFACTURING; COMPETITION; CONVERSION EFFICIENCY; DIFFUSION; PHOSPHORUS; SILICON NITRIDE;

SOLAR CELLS;

EID: 75649139451     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/25/1/015001     Document Type: Article

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