Characterization of ion emission of an extreme ultraviolet generating discharge produced Sn plasma

Journal of Applied Physics

Volumn 107, Issue 1, 2010, Pages

  Gielissen, K ^a   Sidelnikov, Y ^b   Glushkov, D ^c   Soer, W A ^d   Banine, V ^c   Mullen, J J A M V D ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b INSTITUTE OF SPECTROSCOPY   (Russian Federation)

^c ASML   (Netherlands)

^d PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DISCHARGE ENERGY; ELECTRICAL INPUT ENERGY; EXPANDING PLASMAS; EXTREME ULTRAVIOLET; FARADAY CUPS; HIGH ENERGY; HIGH-ENERGY IONS; ION EMISSIONS; ION ENERGY DISTRIBUTIONS; ION FLUXES; ION SPECTROMETERS; PLASMA EXPANSION; TIME-OF-FLIGHT TECHNIQUES;

ELECTRIC DISCHARGES; HIGH ENERGY PHYSICS; IONS; PLASMAS; ULTRAVIOLET DEVICES;

TIN;

EID: 75649116472     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3268462     Document Type: Article

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