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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 8 B, 2004, Pages 5854-5856

Gratings in GaN membranes

(7) Chen, Chii Chang a Hou, Chia Hung a Sheu, Jinn Kong a Chang, Jenq Yang a Ming Hung, L I a Chi, Gou Chung a Wu, Chuck b

a NATIONAL CENTRAL UNIVERSITY (Taiwan)

b Canyon Materials Inc (United States)

Author keywords

GaN; Gratings; Membranes; Microlenses; Microoptics

Indexed keywords

CHARGE COUPLED DEVICES; CHEMICAL VAPOR DEPOSITION; DIFFRACTION GRATINGS; INDUCTIVELY COUPLED PLASMA; MICROLENSES; MICROOPTICS; OPTICAL DEVICES; PHOTOLITHOGRAPHY; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; ULTRAVIOLET RADIATION;

DIFFRACTION ANGLES; GAN GRATINGS; MICRO-OPTO-ELECTRO-MECHANICAL SYSTEMS (MOEMS); SURFACE EMITTING LASERS;

GALLIUM;

EID: 7544247625 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.43.5854 Document Type: Conference Paper

Times cited : (3)

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