Silicon-based transmissive diffractive optical element

Optics Letters

Volumn 28, Issue 14, 2003, Pages 1260-1262

  Lee, Chien Chieh ^a   Chang, Yu Cheng ^a   Wang, Chih Ming ^a   Chang, Jenq Yang ^a   Chi, Gou Chung ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ETCHING; OPTICAL BEAM SPLITTERS; PHOTODIODES; SEMICONDUCTOR LASERS; SILICON NITRIDE; SUBSTRATES;

DIFFRACTIVE OPTICAL ELEMENTS (DOE);

DIFFRACTIVE OPTICS;

EID: 0042810835     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.28.001260     Document Type: Article

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