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Volumn 85, Issue 3, 2002, Pages 636-640

Effects of coffee-bean-like morphology and graded interlayer on texture evolution of plasma-enhanced chemical-vapor-deposited Ti-C-N films

Author keywords

[No Author keywords available]

Indexed keywords

GRAIN SIZE AND SHAPE; MORPHOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RESIDUAL STRESSES; SYNTHESIS (CHEMICAL); TEXTURES; TITANIUM CARBIDE; TITANIUM NITRIDE; TWINNING;

EID: 0036509746     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.2002.tb00143.x     Document Type: Article
Times cited : (5)

References (20)
  • 6
    • 36449008567 scopus 로고
    • Effects of strain energy on the preferred orientation of TiN thin films
    • (1993) J. Appl. Phys. , vol.74 , Issue.3 , pp. 1692-1696
    • Oh, U.C.1    Je, J.H.2
  • 18


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.