|
Volumn 85, Issue 3, 2002, Pages 636-640
|
Effects of coffee-bean-like morphology and graded interlayer on texture evolution of plasma-enhanced chemical-vapor-deposited Ti-C-N films
a b c a |
Author keywords
[No Author keywords available]
|
Indexed keywords
GRAIN SIZE AND SHAPE;
MORPHOLOGY;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
RESIDUAL STRESSES;
SYNTHESIS (CHEMICAL);
TEXTURES;
TITANIUM CARBIDE;
TITANIUM NITRIDE;
TWINNING;
GRADED INTERLAYERS;
PSEUDOMORPHIC FORCES;
THIN FILMS;
|
EID: 0036509746
PISSN: 00027820
EISSN: None
Source Type: Journal
DOI: 10.1111/j.1151-2916.2002.tb00143.x Document Type: Article |
Times cited : (5)
|
References (20)
|