Tribological properties of DLC films deposited under various conditions using a plasma-enhanced CVD

Tribology International

Volumn 37, Issue 11-12 SPEC.ISS., 2004, Pages 975-982

  Zhang, Wei ^a   Tanaka, Akihiro ^b  

^a NATIONAL KEY LABORATORY FOR REMANUFACTURING   (China)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Bias voltage; Diamond like carbon; Friction; Wear

Indexed keywords

BENZENE; COMPRESSIVE STRESS; FRICTION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TRIBOLOGY; WEAR RESISTANCE;

BIAS VOLTAGE; MULTILAYER FILMS; PLASMA DISCHARGE; TRIBO-OXIDATION;

DIAMOND LIKE CARBON FILMS;

EID: 7544230372     PISSN: 0301679X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.triboint.2004.07.015     Document Type: Article

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