Quasi-static and dynamic electromechanical response of piezoelectric multilayer cantilever beams

Sensors and Actuators, A: Physical

Volumn 157, Issue 2, 2010, Pages 198-209

  Edqvist, E ^a   Hedlund, E ^a   Lundberg, B ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

Cantilever; Dynamic; Multilayer; Piezoelectric; PVDF TrFE; Quasi static; Tip deflection

Indexed keywords

ALUMINIUM ELECTRODE; ASYMMETRIC CONFIGURATIONS; CANTILEVER; COPPER LAYER; DRIVING VOLTAGES; ELECTROMECHANICAL RESPONSE; EULER-BERNOULLI; HEIDENHAIN; LIGHT MICROSCOPES; LOSSLESS; MANUFACTURING PROCESS; NONLINEAR PIEZOELECTRICITY; PER UNIT; PIEZOELECTRIC; PIEZOELECTRIC MULTI-LAYER CANTILEVERS; PIEZOELECTRIC RESPONSE; QUASI-STATIC; QUASI-STATIC CONDITIONS; RESONANCE FREQUENCIES; SCANNING ELECTRON MICROSCOPE; THEORETICAL MODELS; TIP DEFLECTION; TIP DISPLACEMENT;

ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; CRYSTALLOGRAPHY; DYNAMIC RESPONSE; ELECTRIC LOAD SHEDDING; ELECTROMECHANICAL DEVICES; MICROSCOPES; MULTILAYERS; NANOCANTILEVERS; NATURAL FREQUENCIES; PIEZOELECTRIC ACTUATORS; POLYIMIDES; SCANNING ELECTRON MICROSCOPY;

PIEZOELECTRICITY;

EID: 75149146129     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.11.013     Document Type: Article

References (15)

1. Smits J.G. Design considerations of a piezoelectric-on-silicon microrobot. Sens. Actuators A: Phys. 35 (1992) 129-135
2. Chen P.L., Muller R.S., and Andrews A.P. Integrated silicon PI-FET accelerometer with proof mass. Sens. Actuators A: Phys. 5 (1984) 119-126
3. Glockner S., Goring R., and Gotz B. Multichannel fiber-optic switches based on MOEM systems. SPIE Int. Soc. Opt. Eng. Austin, TX, USA (1997) 76-85
4. Watanabe S., and Fujii T. Micro-fabricated piezoelectric cantilever for atomic force microscopy. Rev. Sci. Instrum. 67 (1996) 3898-3903
5. Priya S., Chen C.-T., Fye D., and Zahnd J. Piezoelectric windmill: a novel solution to remote sensing. Jpn. J. Appl. Phys. Part 2: Lett. 44 (2005) 104-107
6. Smits J.G., and Choi W.S. The constituent equations of piezoelectric heterogeneous bimorphs. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 38 (1991) 256-270
7. DeVoe D.L., and Pisano A.P. Modeling and optimal design of piezoelectric cantilever microactuators. J. Microelectromech. Syst. 6 (1997) 266-270
8. Timoshenko S.P. Analysis of bi-metal thermoststats. J. Optical Soc. Am. 11 (1925) 233-255
9. Weinberg M.S. Working equations for piezoelectric actuators and sensors. J. Microelectromech. Syst. 8 (1999) 529-533
10. Ballas R.G., Schlaak H.F., and Schmid A.J. The constituent equations of piezoelectric multilayer bending actuators in closed analytical form and experimental results. Sens. Actuators A: Phys. 130-131 (2006) 91-98
11. Ballas R.G. Piezoelectric Multilayer Beam Bending Actuators: Static and Dynamic Behavior and Aspects of Sensor Integration (2007), Springer-Verlag, Berlin, Heidelberg
12. Volterra E., and Zachmanoglou E.C. Dynamics of Vibrations (1965), Charles E. Merill Books, Inc, Columbus, Ohio
13. Edqvist E., Snis N., and Johansson S. Gentle dry etching of P(VDF-TrFE) multilayer micro actuator structures by use of an inductive coupled plasma. J. Micromech. Microeng. 18 (2008) 015007
14. Vinogradov A.M. A constitutive model of piezoelectric polymer PVDF. SPIE-Int. Soc. Opt. Eng. Newport Beach, CA, USA (1999) 711-718
15. Vinogradov A.M., Schumacher S.C., and Rassi E.M. Dynamic response of the piezoelectric polymer PVDF. Int. J. Appl. Electromagn. Mech. 22 (2005) 39-51