Gentle dry etching of P(VDF-TrFE) multilayer micro actuator structures by use of an inductive coupled plasma

Journal of Micromechanics and Microengineering

Volumn 18, Issue 1, 2008, Pages

  Edqvist, E ^a   Snis, N ^a   Johansson, S ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALUMINUM; ELECTRIC FIELD EFFECTS; ELECTROCHEMICAL ELECTRODES; ETCHING; INDUCTIVELY COUPLED PLASMA; MICROFABRICATION;

ALUMINUM ELECTRODES; BOSCH PROCESS; CONTACT AREA; MINIATURIZED ACTUATORS;

MULTILAYERS;

EID: 41849111276     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/1/015007     Document Type: Article

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