Simulation-based assessment of batching strategies in a multi-product semiconductor wafer fabrication facility

International Journal of Simulation: Systems, Science and Technology

Volumn 6, Issue 5, 2005, Pages 3-13

  Habenicht, Ilka ^a   Mönch, Lars ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Batching; Discrete event simulation; Performance assessment; Semiconductor Manufacturing

Indexed keywords

DISCRETE EVENT SIMULATION; MANUFACTURE; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; WAFER BONDING;

BATCHING; BATCHING STRATEGY; DISPATCHING RULES; PERFORMANCE ASSESSMENT; REFERENCE MODELING; SEMICONDUCTOR MANUFACTURING; SEMICONDUCTOR WAFER FABRICATION; SIMULATION STUDIES;

SILICON WAFERS;

EID: 74549195450     PISSN: 14738031     EISSN: 1473804X     Source Type: Journal    
DOI: None     Document Type: Article

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