A simulation framework for the performance assessment of shop-floor control systems

Simulation

Volumn 79, Issue 3, 2003, Pages 163-170

  Mönch, Lars ^a   Rose, Oliver ^b   Sturm, Roland ^c  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF WÜRZBURG   (Germany)

^c FRAUNHOFER INSTITUTE FOR MANUFACTURING ENGINEERING AND AUTOMATION IPA   (Germany)

Author keywords

Performance evaluation; Semiconductor manufacturing; Shop floor control software; Shop floor emulation via simulation

Indexed keywords

ALGORITHMS; COMPUTER SOFTWARE; DATA STRUCTURES; DATABASE SYSTEMS; INTEROPERABILITY; PRODUCTION CONTROL; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

PERFORMANCE EVALUATION; SHOP-FLOOR CONTROL SYSTEM; WAFER FABRICATION;

COMPUTER SIMULATION;

EID: 18544406120     PISSN: 00375497     EISSN: None     Source Type: Journal    
DOI: 10.1177/0037549703256039     Document Type: Article

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