Alternative loading and dispatching policies for furnace operations in semiconductor manufacturing: A comparison by simulation

Winter Simulation Conference Proceedings

Volumn 2, Issue , 2000, Pages 1428-1435

  Akcali, Elif ^a   Uzsoy, Reha ^a   Hiscock, David G ^b   Moser, Anne L ^b   Teyner, Timothy J ^b  

^a SCHOOL OF INDUSTRIAL ENGINEERING   (United States)

^b INTERSIL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIFFUSION; INDUSTRIAL FURNACES; MATHEMATICAL MODELS;

BATCH PROCESSING MACHINES; DISPATCH POLICIES;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034428779     PISSN: 02750708     EISSN: None     Source Type: Journal    
DOI: 10.1109/WSC.2000.899121     Document Type: Article

References (11)

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