Nonlinear dynamic study of a bistable MEMS beam toggled by optical actuation

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn , Issue , 2002, Pages 117-120

  Sulfridge, Marc ^a   Saif, Taher ^a   Miller, Norman ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; DYNAMIC ANALYSIS; DYNAMICS; LASER PULSES; MECHANICAL ENGINEERING; MEMS; MICROELECTROMECHANICAL DEVICES; PRESSURE;

ANOMALOUS BEHAVIOR; BISTABLE BEAM; BISTABLES; LONG DURATION; NON-LINEAR DYNAMIC ANALYSIS; NON-LINEAR DYNAMICS; OPTICAL ACTUATION; RADIATION PRESSURE; SHORT DURATION PULSE; SHORT-DURATION LASER PULSE; STABLE STATE;

EXPERIMENTS;

EID: 78249240640     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2002-33260     Document Type: Conference Paper

References (6)

1. Hoerner, S. F., Fluid Dynamic Drag: Practical Aerodynamic Drag and Hydrodynamic Resistance, Midland Park, NJ, 1965.
2. Lazan, B. J., Damping of Materials and Members in Structural Mechanics, Pergamon Press, Oxford, 1968.
3. Saif, M. T. A. and Miller, N. R., "Modeling and Analysis of a Tunable Bistable MEMS for Opto-mechanical Computational Logic Elements", ASME IMECE'99-MEMS, 1, 1999.
4. Saif, M. T. A., "On a Tunable Bistable MEMS - Theory and Experiment", JMEMS, 9(2), pp 157-70, 2000.
5. Sulfridge, M. A., Saif, M. T. A., Miller, N. R., and O'Hara, K., "Actuation of MEMS by Light: An Optical Actuator", ASME IMECE'01-MEMS, 1, 2001.
6. Sulfridge, M. A., Saif, M. T. A., Miller, N. R., and O'Hara, K., "Optical Actuation of a Bistable MEMS", JMEMS, 11(4), 2002.