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Journal of Microelectromechanical Systems

Volumn 11, Issue 4, 2002, Pages 302-308

Electrostatic actuation of microscale liquid-metal droplets

(7) Latorre, Laurent b Kim, Joonwon c Lee, Junghoon a,d De Guzman, Peter Patrick c Lee, Hyesog J c Nouet, Pascal a,b Kim, Chang Jin a,c

a IEEE

b LIRMM (France)

c UNIVERSITY OF CALIFORNIA (United States)

d Northwestern University (United States)

Author keywords

Electrostatic actuation; Liquid metal droplet; Microelectromechanical systems (MEMS); Microswitch

Indexed keywords

COMPUTER SIMULATION; CONTACT ANGLE; ELECTROSTATIC ACTUATORS; FINITE ELEMENT METHOD; LASER APPLICATIONS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROSCOPES; NUCLEATION; OPTIMIZATION; SILICON WAFERS;

LASER IMAGING;

LIQUID METALS;

EID: 0036687721 PISSN: 10577157 EISSN: None Source Type: Journal
DOI: 10.1109/JMEMS.2002.800934 Document Type: Article

Times cited : (50)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.