Amine functionalized SU-8 layer guiding Love mode surface acoustic wave

Sensors and Actuators, B: Chemical

Volumn 144, Issue 1, 2010, Pages 23-26

  Fissi, Lamia El ^a   Friedt, Jean Michel ^a   Chérioux, Frédéric ^b   Ballandras, Sylvain ^b  

^a Senseor   (France)

^b UNIVERSITÉ DE FRANCHE COMTÉ   (France)

Author keywords

Love mode; Micro fluidics; Packaging; Sensor; Surface acoustic wave

Indexed keywords

ACOUSTIC SIGNALS; ACTIVE LAYER; AQUEOUS SOLUTIONS; CHEMICAL FUNCTIONALIZATION; FUNCTIONALIZED; IN-SITU ANALYSIS; LOVE MODE; MASS EFFECTS; MOLAR WEIGHT; ORGANOMETALLIC COMPLEX; QUARTZ SUBSTRATE; SELECTIVE DETECTION; SENSOR SURFACES; SU-8 PHOTORESIST; SURFACE ACOUSTIC WAVES; TIME RESOLUTION;

ACOUSTIC PROPERTIES; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTOELECTRIC EFFECTS; ELECTRIC CURRENTS; FLUIDICS; ORGANOMETALLICS; OXIDE MINERALS; PHOTORESISTS; QUARTZ; SENSORS;

ACOUSTICS;

EID: 74149086321     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.09.011     Document Type: Article

References (30)

1. Shaw J.M., Gelorme J.D., Labianca N.C., Conley W.E., and Holmes S. J. IBM J. Res. Dev. 41 (1997) 81-94
2. Lorentz H., Despont M., Fahrni N., Labianca N., Renaud P., and Vettiger M. J. Micromech. Microeng. 7 (1997) 121-124
3. Georgel V., Verjus F., van Grusven E.C.E., Poulichet P., Lissorgues G., Pellet C., Chamaly S., and Bourouina T. Sens. Actuators A 142 (2008) 185-191
4. Desai S.P., Taff B.M., and Voldman. J. Langmuir 24 (2008) 575-581
5. Salazar G.T.A., Wang Y., Young G., Bachman M., Sims C.E., li G.P., and Allbritton N.L. Anal. Chem. 79 (2007) 682-687
6. Lo R., and Meng E. Sens. Actuators B 132 (2008) 531-539
7. Pennell T., Suchyna T., Wang J., Heo J., Felske J.D., Sachs F., and Hua S.Z. Anal. Chem. 80 (2008) 2447-2451
8. Kanazawa K.K., and Gordon II J.G. Anal. Chem. 57 (1985) 1770-1771
9. Tsortos A., Papadakis G., and Gizeli E. Biosens. Bioelec. 24 (2008) 842-847
10. Aung K.M.M., Ho X., and Su X. Sens. Actuators B. 131 (2008) 371-378
11. Francis L., Friedt J.-M., Bartic C., and Campitelli A. SPIE Proceedings Series 5455 (2004) 353-363
12. Zelonka R.A., and Baird M.C. Can. J. Chem. 50 (1972) 3063-3068
13. Wang J.W., Moseley K., and Maitlis P.M. J. Am. Chem. Soc. (1969) 5970-5977
14. Bennett M.A., and Smith A.K. J. Chem. Soc. Dalton Trans. (1974) 233-241
15. Tseng F.G., Lin K.H., Hsu T.T., and Chieng C.C. Sens. Actuators A 111 (2004) 107-117
16. Nordstrom M., Marie R., Calleja M., and Boisen A. J. Micromech. Microeng. 14 (2004) 1614-1617
17. Wang Y., Bachman M., Sims C.E., Li G.P., and Allbriton N.L. Langmuir 22 (2006) 2719-2725
18. Moon J.H., Shin J.W., Kim S.Y., and Park J.W. Langmuir 12 (1996) 4621-4625
19. Romaschin A.D., Bui L.N., Thompson M., McKeown N.B., and Kalman P.G. Analyst 118 (1993) 463-474
20. El Fissi L., Friedt J.-M., and Ballandras S. IEEE Ultrasonic Symposium (2007) 484-487
21. El Fissi L., Friedt J.-M., Ballandras S., Robert L., and Cherioux F. IEEE International Frequency Control Symposium (2008) 711-716
22. Stebler-Rötzthlisberger M., Hummel W., Pittet P.A., Bürgi H.-B., Ludi A., and Merbach A.E. Inorg. Chem. 27 (1988) 1358-1362
23. Thompson M., and Stone D.C. Surface-Launched Acoustic Wave Sensors: Chemical Sensing and Thin-Film Characterization (1997), Wiley-Interscience
24. Banda P. A. Investigation on surface acoustic wave gas sensors. Application to ozone sensing, PhD Thesis, Royal Melbourne Institute of Technology, 1995.
25. Friedt J.-M., Choi K.H., Frederix F., and Campitelli A. J. Electron. Soc. 150 (2003) H229-H234
26. Varughese B., Chellamma S., and Lieberman M. Langmuir 18 (2002) 7964-7970
27. Shepherd R.E., Proctor A., Henderson W.W., and Myser T.K. Inorg. Chem. 26 (1987) 2440-2444
28. Cagnola E.A., Quiroga M.E., Liprandi D.A., and L'Argentièire P.C. Appl. Catal. A 274 (2004) 205-212
29. Mendes F.M.T., and Schmal M. Appl. Catal. A 151 (1997) 393-408
30. Garrett C.E., and Prasad K. Adv. Synth. Catal. 346 (2004) 889-893