Spatial variation of negative oxygen ion energy distribution in RF magnetron plasma with oxide target

Japanese Journal of Applied Physics

Volumn 48, Issue 11, 2009, Pages

  Ishijima, Tatsuo ^a   Goto, Kazuya ^a   Ohshima, Norikazu ^b   Kinoshita, Keizo ^b   Toyoda, Hirotaka ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY ANALYZER; ENERGY DISTRIBUTIONS; ION ENERGY DISTRIBUTIONS; MASS ANALYZERS; RF MAGNETRONS; SIMPLE EQUIVALENT CIRCUIT MODEL; SPATIAL VARIATIONS;

ELECTRIC POWER DISTRIBUTION; ION BEAMS; MAGNETRONS; OXYGEN;

IONS;

EID: 73849103971     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.48.116004     Document Type: Article

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