Fabrication of metallic micromolds by laser and electro-discharge micromachining

Microsystem Technologies

Volumn 16, Issue 3, 2010, Pages 477-485

  Shiu, Pun Pang ^a   Knopf, George K ^a   Ostojic, Mile ^b  

^a UNIVERSITY OF WESTERN ONTARIO   (Canada)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BRASS SUBSTRATES; ELECTRODISCHARGES; FABRICATION METHODOLOGY; FABRICATION TECHNIQUE; FLUIDIC NETWORKS; HIGH-ASPECT RATIO; HOT-EMBOSSING; LASER MICRO-MACHINING; MANUFACTURING PROCESS; METALLIC MASKS; METALLIC MICROMOLDS; MICRO EDM; MICRO MIXERS; MICRO MOLDS; MICROFEATURES; MOLD-MASTERS; MOLDING TOOLS; OPTICAL PROFILER; RELIEF PATTERNS; SURFACE FINISHES;

BRASS; COMPOSITE MICROMECHANICS; FABRICATION; MICROCHANNELS; MICROMACHINING; MIXERS (MACHINERY); MOLDS; PRESSURE DROP; SILICONES; SUBSTRATES; TWO DIMENSIONAL;

ASPECT RATIO;

EID: 73349125758     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0931-1     Document Type: Article

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